Hostname: page-component-cd9895bd7-8ctnn Total loading time: 0 Render date: 2024-12-25T06:01:52.210Z Has data issue: false hasContentIssue false
  • English
  • Français

Application of high-power ion beams for technology

Published online by Cambridge University Press:  09 March 2009

G.E. Remnev  and
V.A. Shulov
G.E. Remnev
Affiliation:
Nuclear Physics Institute, Tomsk, Russia
V.A. Shulov
Affiliation:
Aviation Institute, Moscow, Russia
Get access Rights & Permissions [Opens in a new window]

Abstract

Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.

Type
Regular Papers
Information
Laser and Particle Beams , Volume 11 , Issue 4 , December 1993 , pp. 707 - 731
Copyright
Copyright © Cambridge University Press 1993

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Anisimov, S.I. et al. . 1970 In High Power Radiation Effect on Metals. (Nauka, Moscow) p. 272.Google Scholar
Asainov, O.X. et al. 1987 In Physika i Chimiia Obrabotki Materialov, 2, 53.Google Scholar
Baglin, J.E.E. et al. 1980 Appl. Phys. Lett. 37, 187.Google Scholar
Basov, N.G. et al. 1966 J. Exp. Theor. Phys. 51, 998.Google Scholar
Boiko, V.M. & Evstigneev, V.N. 1989 The effect of high-power beams of charged particles on materials, M.Goseneroatomizdat.Google Scholar
Boiko, V.M. et al. 1990 J. Poverhnost, p. 111.Google Scholar
Bojarko, E.Y. et al. 1986 Nucl. Instrum. Meth. 17, 162.CrossRefGoogle Scholar
Chen, L.J. et al. 1982 Mater. Res. Soc. Symp. Prov. 7, 319.CrossRefGoogle Scholar
Cherepnin, N.V. 1973 M. Sovetskoe Radio, 384.Google Scholar
Chistiakov, S.A. et al. 1988 In Proceedings of BEAMS '88, p. 808.Google Scholar
Chistiakov, S.A. et al. 1989 Nucl. Instrum. Meth. Phys. Res. 42, 342.CrossRefGoogle Scholar
Chistiakov, S.A. et al. 1990 In Proceedings of BEAMS '90, pp. 739–744.Google Scholar
Didenki, A.D. et al. 1986 Poverhnost Phs., Chim., Mech. N1, 150.Google Scholar
Didenko, A.N. et al. 1986a BEAMS '86, Proceedings of the 6th International Conference on High Power Particle, Beams, Kobe, Japan, p. 617.Google Scholar
Didenko, A.N. et al. 1986b Nucl. Instrum. Meth. 17, 165.CrossRefGoogle Scholar
Didenko, A.N. et al. 1990 Physics and Chemistry of Material Treatment, in print.Google Scholar
Didenko, A.N. et al. 1987 Charged particle beams effect on the surface of metals and alloys, M.: Energoatomizdat.Google Scholar
Duwes, P. et al. 1960 Appl. Phys. 30, 1136.CrossRefGoogle Scholar
Fastow, R. et al. Phys. Rev. B. 32, 893.Google Scholar
Gaponov, S.V. 1976 Elek. Promyshl. J. BV.I 49, 11.Google Scholar
Glazunov, S.G. & Kolatchov, B.A. 1970 Titanium Alloys Metallography Metallurgy.Google Scholar
Golovashkin, A.I. et al. 1988 Lett. J. Tech. Phys. 47, 157.Google Scholar
Goncharov, O.I. et al. 1990 In Proceedings of BEAMS '90, pp. 1243–1248.Google Scholar
Gryzinski, M. et al. 1988 In Proceedings of BEAMS '88, p. 319.Google Scholar
Gyulai, J. 1987 In Proceedings of EPM 87, Drezden, pp. 74–79.Google Scholar
Gyulai, J. & Krafcsik, T. 1989 Nucl. Instrum. Meth. Phys. Res. 37/38, 275.CrossRefGoogle Scholar
Jiang, X.L. et al. 1985 IEEE Trans. Nucl. Sci. NS 32, 3341.CrossRefGoogle Scholar
Kitamura, A. et al. 1988 In Proceedings of BEAMS '88, p. 791.Google Scholar
Kitamura, A. et al. 1990 In Proceedings of BEAMS '90, pp. 745–750.Google Scholar
Krafcsik, I. et al. 1986 Phys. Stat. Sol. A 94, 855.CrossRefGoogle Scholar
Krafcsik, I. et al. 1987 Nucl. Instrum. Meth. Phys. Res. 21, 604.CrossRefGoogle Scholar
Kurakin, I.B. et al. 1988 In Proceedings of EBT-88, Bulgaria, p. 745.Google Scholar
Ligachev, A.E. et al. 1986 In BEAMS '86, Proceedings of the 6th International Conference on High Power Particle Beams, Kobe, Japan, p. 634.Google Scholar
Lilienfeld, D.A. et al. 1987 Nucl. Instrum. Meth. 19/20, 1.CrossRefGoogle Scholar
Masugkata, K. et al. 1990 In Proceedings of BEAMS '90, pp. 1254–1260.Google Scholar
Nakagawa, Y. & Ariyoshi, T. 1988 IEEE Trans. Plasma Sci. 16, 459.CrossRefGoogle Scholar
Nakagawa, Y. et al. 1988a Jpn. J. Appl. Phys. 27, 719.CrossRefGoogle Scholar
Nakagawa, Y. et al. 1988b In Proceedings of BEAMS '88, p. 1475.Google Scholar
Neri, J.M. et al. 1980 Appl. Phys. Lett. 37, 101.CrossRefGoogle Scholar
Piekoszewski, J. et al. 1981 Phys. Stat. Sol. A 67, 183.CrossRefGoogle Scholar
Pogrebnjak, A.D. et al. 1987 Phyzika N 1, 52.Google Scholar
Pogrebnjak, A.D. et al. 1988 In Proceedings of Modification of Industrial Materials Properties by the Charge-Particle Beams, Vol. 1, Tomsk, GKNT, p. 144.Google Scholar
Pogrebnjak, A.D. et al. 1989a Nucl. Instrum. Meth. 36, 286.CrossRefGoogle Scholar
Pogrebnjak, A.D. et al. 1989b Mater. Sci. Eng. A 115, 175.CrossRefGoogle Scholar
Pogrebnjak, A.D. et al. 1990 Poverhnost 12, 112.Google Scholar
Puchkareva, L.N. & Remnev, G.E. 1989 In Transactions of the Symposium “Interaction of Atom Particles with the Surface of a Solid” (FAN Publishing House, Tashkent), p. 173.Google Scholar
Remnev, G.E. & Pogrebnjak, A.D. 1990 In Novosti Nauki i Techniki, Vol. 2, (VINITI, Moscow), p. 30.Google Scholar
Remnev, G.E. et al. 1988 In Proceedings of the IInd International Conference on Electron-Beam Technology, Varna, Bulgaria, p. 629.Google Scholar
Remnev, G.E. et al. 1990 In Proceedings of Advanced Methods of Producing of Industrial Materials and Compounds, Volograd, GKNT, p. 70.Google Scholar
Rykalin, N.N. et al. 1985 In Laser and Electron-Beam Treatment of Materials (Mashinostroenie, Moscow), p. 496.Google Scholar
Shimoroti, M. et al. 1989 Jpn. J. Appl. Phys. 28, 488.Google Scholar
Shimotori, Y. et al. 1990 In Proceedings of BEAMS '90, p. 1469.Google Scholar
Shulov, V.A. et al. 1990a Metal Protection, in print.Google Scholar
Shulov, V.A. et al. 1990b Poverhnost 7, 124.Google Scholar
Usov, Y.P. et al. 1981 In Abstracts of Reports to the 3rd All-Union Conference on Electron Ion Technology Application in the Economy, Tbilisi, p. 110.Google Scholar
Verigin, A.A. et al. 1988 Poverhnost 9, 108.Google Scholar
Volkov, N.B. et al. 1988 In Materials of the 1st All-Union Conference “Modification of Industrial Materials by Charged Particle Beams”, Tomsk, Rt. II, p. 67.Google Scholar
Yakoyama, M. et al. 1988 J. Appl. Phys. 63, 968.Google Scholar
Yatsui, K. 1989 Laser Part. Beams 7, 733.CrossRefGoogle Scholar
Yatsui, K. et al. 1988 In Proceedings of BEAMS '88, p. 522.Google Scholar
Zanodchikov, V.V. et al. 1986 Nucl. Instrum. Meth. 17, 67.Google Scholar