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Targets for x-ray laser experiments

Published online by Cambridge University Press:  09 March 2009

D. A. Steinman
Affiliation:
KMS Fusion Incorporated, 3621 South State Road, P.O. Box 1567, Ann Arbor, Michigan 48106-1567
R. A. Lee
Affiliation:
KMS Fusion Incorporated, 3621 South State Road, P.O. Box 1567, Ann Arbor, Michigan 48106-1567
W. J. Hillegas
Affiliation:
KMS Fusion Incorporated, 3621 South State Road, P.O. Box 1567, Ann Arbor, Michigan 48106-1567

Abstract

A photolithographic process to fabricate the transition metal targets used in X-ray laser experiments is described.

Type
Research Article
Copyright
Copyright © Cambridge University Press 1983

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References

Robinson, A. L. 1982 Science, 215, 488.CrossRefGoogle Scholar
Vossen, J. L. & Kern, W. 1978 Thin Film Processes, Academic Press, New York.Google Scholar