Hostname: page-component-cd9895bd7-p9bg8 Total loading time: 0 Render date: 2024-12-25T05:26:02.840Z Has data issue: false hasContentIssue false
  • English
  • Français

Study of laser induced ablation with focused ion beam/scanning electron microscope devices

Published online by Cambridge University Press:  28 February 2007

MARCO BUSSOLI ,
DIMITRI BATANI ,
TARA DESAI ,
FEDERICO CANOVA ,
MARZIALE MILANI ,
MILAN TRTICA ,
BILJANA GAKOVIC  and
EDOUARD KROUSKY
MARCO BUSSOLI
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
DIMITRI BATANI
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
TARA DESAI
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
FEDERICO CANOVA
Affiliation:
Dipartimento di Fisica “G. Occhialini,” Università di Milano Bicocca, Milano, Italy
MARZIALE MILANI
Affiliation:
Dipartimento di Scienza dei Materiali and “Bombay” FIB/SEM Laboratory, Università di Milano Bicocca, Milano, Italy
MILAN TRTICA
Affiliation:
Vinca Institute of Nuclear Sciences, Belgrade, Serbia
BILJANA GAKOVIC
Affiliation:
Vinca Institute of Nuclear Sciences, Belgrade, Serbia
EDOUARD KROUSKY
Affiliation:
PALS Research Centre, Prague, Czech Republic
Get access Rights & Permissions [Opens in a new window]

Abstract

We propose the use of Focused Ion Beam/Scanning Electron Microscope (FIB/SEM) devices for the analysis of ablation results. Ablated samples have been obtained by irradiating an Al planar target with an optically smoothed iodine laser working at 0.44 μm. The interpretation of FIB images shows the high potentiality of the technique.

Keywords

Electron emission relaxation regionIon fluxLaser plasma generationLaser powerPlasma heatingPlasma interactionTarget heating
Type
Research Article
Information
Laser and Particle Beams , Volume 25 , Issue 1 , March 2007 , pp. 121 - 125
Copyright
© 2007 Cambridge University Press

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Alti, K. & Khare, A. (2006). Low-energy low-divergence pulsed indium atomic beam by laser ablation. Laser Part. Beams 24, 47–53.Google Scholar
Ballerini, M., Milani, M., Batani, D. & Squadrini, F. (2001). Focused ion beam techniques for the analysis of biological samples: A revolution in ultra microscopy? In Three Dimensional and Multidimensional Microscopy: Image Acquisition and Processing. Vol. 4261, p. 92. San Jose, CA: SPIE.
Ballerini, M., Milani, M., Costato, M., Squadrini, F. & Turcu, I.C.E. (1997). Life science applications of focused ion beams (FIB). Eur. J. Histochem. 41, 89–90.Google Scholar
Bashir, S. (2007). Laser ablation of ion irradiated CR-39. Laser Part. Beams 25, 181–191.Google Scholar
Batani, D., Bleu, C. & Lower, Th. (2002). Modelistic, simulation, and application of phase plates. Eur. Phys. J. D 19, 231.Google Scholar
Batani, D., Bossi, S., Benuzzi, A., Koenig, M., Faral, B., JBoudenne, J.M., Grandjouan, N., Temporal, M. & Atzeni, S. (1996). Optical smoothing for shock wave generation: Application to the measurement of equation of state. Laser Part. Beams 14, 211–233.Google Scholar
Batani, D., Stabile, H., Ravasio, A., Lucchini, G., Desai, T., Ullschmied, J., Krousky, E., Juha, L., Skala, J., Kralikova, B., Pfeifer, M., Kadlec, C., Mocek, T., Präg, A., Nishimura, H. & Ochi, Y. (2003). Ablation pressure scaling at short laser wavelength. Phys.Rev. E 68, 067403.Google Scholar
Beilis, I. (2007). Laser plasma generation and plasma interaction with ablative target. Laser Part. Beams 25, 53–63.Google Scholar
Bleiner, D. & Bogaerts, A. (2006). Multiplicity and contiguity of ablation mechanisms in laser-assisted analytical micro sampling. Spectrochimica Acta B 61, 421–432.Google Scholar
Bleiner, D. & Gasser, P. (2004). Structural features of laser ablation particulate from Si target, as revealed by focused ion beam technology. Appl. Phys. A 79, 1019–1022.Google Scholar
Desai, T., Batani, D., Rossetti, S. & Lucchini, G. (2005). Laser induced ablation and crater formation at high laser flux. Rad. Effects Defects Solids 160, 595–600.Google Scholar
Di Bernardo, A., Batani, D., Desai, T., Courtois, C., Cros, B. & Matthieussent, G. (2003). High intensity ultra short laser induced ablation of metal targets in the presence of ambient gas. Laser Part. Beams 21, 59–64.Google Scholar
Fernandez, J.C., Hegelich, B.M., Cobble, J.A., Flippo, K.A., Letzring, S.A., Johnson, R.P., Gautier, D.C., Shimada, T., Kyrala, G.A., Wang, Y.Q., Wetteland, C.J. & Schreiber, J. (2005). Laser-ablation treatment of short-pulse laser targets: Toward an experimental program on energetic-ion interactions with dense plasmas. Laser Part. Beams 23, 267–273.Google Scholar
Gamaly, E.G., Rode, A.V., Luther-Davies, B. & Tikhonchuk, T.V. (2002). Ablation of solids by femtosecond lasers: Ablation mechanism and ablation thresholds for metals and dielectrics. Phys. Plasmas 9, 949–957.Google Scholar
Jungwirth, K. (2005). Recent highlights of the PALS research program. Laser Part. Beams 23, 177–182.Google Scholar
Jungwirth, K., Cejnarova, A., Juha, L., Kralikova, B., Krasa, J., Krousky, E., Krupickova, P., Laska, L., Masek, K., Mocek, T., Pfeifer, M., Prag, A., Renner, O., Rohlena, K., Rus, B., Skala, J., Straka, P. & Ullschmied, J. (2001). The Prague Asterix laser system. Phys. Plasmas 8, 2495–2501.Google Scholar
Koenig, M., Faral, B., Boudenne, J.M., Batani, D., Bossi, S. & Benuzzi, A. (1994). Use of optical smoothing techniques for shock wave generation in laser produced plasmas. Phys. Rev. E 50, R3314–R3317.Google Scholar
Milani, M., Batani, D., Ballerini, M., Squadrini, F., Cotelli, F., Lora Lamia Donin, C., Poletti, G., Pozzi, A., Eidmann, K., Stead, A. & Bernardinello, A. (2004). High resolution microscopy techniques for the analysis of biological samples. Eur. Phys. J.: Appl. Physics 26, 123.Google Scholar
Milani, M., Drobne, D., Tatti, F., Batani, D., Poletti, G., Orsini, F., Zullini, A. & Zrimec, A. (2005). Read-out of soft X-ray contact microscopy microradiographs by focused ion beam/scanning electron microscope. Scanning 27, 49–253.Google Scholar
Milani, M., Magni, S. & Tatti, F. (2006). FIB/SEM for soft matter and life sciences. G.I.T. Imaging Microsc. 8, 38–40.Google Scholar
Miller, J.C. (1994). Laser Ablation—Principles and Applications. Vol. 28. Berlin: Springer-Verlag.
Perrey, C.R., Carter, C.B., Michael, J.R., Kotula, P.G., Stach, E.A. & Radmilovic, V.R. (2004). Using the FIB to characterize nanoparticle materials. J. Microsc. 214, 222–236.Google Scholar
Phaneuf, M.W. (1999). Applications of focused ion beam microscopy to materials science specimens. Micron 30, 277–288.Google Scholar
Schade, W., Bohling, C., Hohmann, K. & Scheel, D. (2006). Laser-induced plasma spectroscopy for mine detection and verification. Laser Part. Beams 24, 241–247.Google Scholar
Sivel, V.G.M., Van den Brand, J., Wang, W.R., Mohdadi, H., Tichelaar, F.D., Alkemade, P.F.A. & Zandbergen, H.W. (2004). Application of the dual-beam FIB/SEM to metals research. J. Microsc. 214, 237–245.Google Scholar
Steer, T.J., Mobus, G., Kraft, O., Wagner, T. & Inkson, B.J. (2002). 3-D focused ion beam mapping of nanoindentation zones in a Cu-Ti multilayered coating. Thin Solid Films 413, 147–154.Google Scholar
Stevenson, R.M., Norman, M.J., Bett, T.H., Pepler, D.A., Danson, C.N. & Ross, I.N. (1994). Binary-phase zone plate arrays for generation of uniform focal profile. Opt. Lett. 19, 363.Google Scholar
Thareja, R.K. & Sharma, A.K. (2006). Reactive pulsed laser ablation: Plasma studies. Laser Part. Beams 24, 311–320.Google Scholar
Trtica, M., Gakovic, B., Batani, B., Desai, T., Panjan, P. & Radak, B. (2006a). Surface modifications of a titanium implant by a picosecond Nd:YAG laser operating at 1064 and 532 nm. Appl. Surface Sci. APSUSC-D-06-00399R1.
Trtica, M., Gakovic, B., Maravic, D., Batani, D., Desai, T. & Redaelli, R. (2006b). Surface modification of titanium by high intensity ultra-short Nd:YAG laser. Mater. Sci. Forum 518, 167–172.Google Scholar
Trusso, S., Barletta, E., Barreca, F., Fazio, E. & Neri, F. (2005). Time resolved imaging studies of the plasma produced by laser ablation of silicon in O2/Ar atmosphere. Laser Part. Beams 23, 149–153.Google Scholar
Veiko, V.P., Shakhno, E.A., Smirnov, V.N., Miaskovski, A.M. & Nikishin, G.D. (2006). Laser-induced film deposition by LIFT: Physical mechanisms and applications. Laser Part. Beams 24, 203–209.Google Scholar
Wieger, V., Strassl, M. & Wintner, E. (2006). Pico- and microsecond laser ablation of dental restorative materials. Laser Part. Beams 24, 41–45.Google Scholar