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Plasma sources based on a low-pressure arc discharge

Published online by Cambridge University Press:  21 August 2003

YU.H. AKHMADEEV ,
S.V. GRIGORIEV ,
N.N. KOVAL  and
P.M. SCHANIN
YU.H. AKHMADEEV
Affiliation:
Institute of High Current Electronics, Russian Academy of Science, Tomsk, Russia
S.V. GRIGORIEV
Affiliation:
Institute of High Current Electronics, Russian Academy of Science, Tomsk, Russia
N.N. KOVAL
Affiliation:
Institute of High Current Electronics, Russian Academy of Science, Tomsk, Russia
P.M. SCHANIN
Affiliation:
Institute of High Current Electronics, Russian Academy of Science, Tomsk, Russia
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Abstract

This article presents two types of a hollow-cathode plasma source based on an arc discharge where the electrons emitted either by a hot filament or by a surface-discharge-based trigger system initiate a gas arc discharge. The sources produce gas plasmas of densities 1010–1012 cm−3 in large volumes of up to 0.5 m3 at a discharge current of 100–200 A and at a pressure of 10−1–10−2 Pa. Consideration is given to some peculiarities of the operation of the plasma sources with various working gases (Ar, N2, O2). The erosion rate of the cold hollow cathode in the designed plasma sources is shown to be 10 times lower than that found in an ordinary one. The sources are employed for plasma-assisted surface modification of solids.

Keywords

Arc dischargeGas plasmaHollow cathodePlasma source
Type
Research Article
Information
Laser and Particle Beams , Volume 21 , Issue 2 , April 2003 , pp. 249 - 254
Copyright
© 2003 Cambridge University Press

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