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Electron beam-excited Xe excilamp's optimal characteristics

Published online by Cambridge University Press:  17 May 2001

A.M. BOICHENKO
Affiliation:
Institute of General Physics, Academy of Sciences of Russia, 38, Vavilova Str., 117942 Moscow, Russia
S.I. YAKOVLENKO
Affiliation:
Institute of General Physics, Academy of Sciences of Russia, 38, Vavilova Str., 117942 Moscow, Russia
V.F. TARASENKO
Affiliation:
High Current Electronics Institute, Academy of Sciences of Russia, 4, Akademichesky Ave., 634055 Tomsk, Russia

Abstract

Calculations of optimal parameters for the e-beam excited Xe spontaneous radiation source (excilamp) at λ ∼ 172 nm have been done. There have been defined optimal values of gas density and specific excitation power. Gas temperature dependence of radiation conversion efficiency related to the injected media energy have been also computed. It has been shown that there is an optimum in excitation pulse duration at frequency operation mode.

Type
Research Article
Copyright
© 2000 Cambridge University Press

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