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Characterization and optimization of a laser generated plasma source of soft X rays

Published online by Cambridge University Press:  09 March 2009

A. M. Rogoyski
Affiliation:
Physics Dept., Kings College, Strand, London, WC2R 2LS
P. Charalambous
Affiliation:
Physics Dept., Kings College, Strand, London, WC2R 2LS
C. P. Hills
Affiliation:
Physics Dept., Kings College, Strand, London, WC2R 2LS
A. G. Michette
Affiliation:
Physics Dept., Kings College, Strand, London, WC2R 2LS

Abstract

An investigation into the feasibility of using a laser-generated plasma source of soft X rays as a laboratory based instrument for biological imaging and microlithography is presented. A preliminary characterization of the source has been carried out with carbon, copper and aluminum targets with specific interest in generating a monochromatic source of soft X rays in the ‘water window’. Measurements of X-ray production with respect to angular distribution, effects of cratering and different focusing conditions are reported. Initial conclusions on the optimization of the source for use in biological imaging are drawn.

Type
Research Article
Copyright
Copyright © Cambridge University Press 1988

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References

Bridges, J. M., Cromer, C. L. & McIlrath, T. J. 1986 Appl. Opt., 25, 2208.CrossRefGoogle Scholar
Browne, M. T. et al. 1984 J. de Physique, C2, 45, 89.Google Scholar
Day, R. H. et al. 1981 J. Appl. Phys., 52, 6965.CrossRefGoogle Scholar
Duston, D. & Davis, J. 1981 Phys. Rev. A. 23, (5), 2602.Google Scholar
Feder, R. & Spiller, E. 1977 Springer-Verlag Series in Topics in Applied Physics. 22.Google Scholar
Gerritsen, H. C., van Brug, H., Bijkerk, F. & van der Wiel, M. J. 1986 J. Appl Phys, 59, (7), 2337.CrossRefGoogle Scholar
Gohil, P. et al. 1985 Appl. Optics, 24, 13, 2024.CrossRefGoogle Scholar
Gohil, P., Kauffman, V. & McIlrath, J. 1986 Appl. Optics, 13, 2039.Google Scholar
Komada, R. et al. 1986 J. Appl. Phys., 59, (9), 3050.Google Scholar
Michette, A. G. et al. 1986 J. Phys D, 19, 363.Google Scholar
Mochizuki, T. et al. 1986 Phys Rev. A, 33, (1), 525.Google Scholar
Tsakiris, G. D. et al. 1986 Europhys. Lett., 2, (3), 213.Google Scholar