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Numerical simulation of pulsed plasma sheath dynamics around a micro-sized tip

Published online by Cambridge University Press:  03 May 2013

H. GHOMI ,
A. MAHMOODPOOR ,
H. GOUDARZI  and
A. R. NIKNAM
H. GHOMI
Affiliation:
Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, 19839-63113, Iran ([email protected])
A. MAHMOODPOOR
Affiliation:
Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, 19839-63113, Iran ([email protected])
H. GOUDARZI
Affiliation:
Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, 19839-63113, Iran ([email protected])
A. R. NIKNAM
Affiliation:
Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, 19839-63113, Iran ([email protected])
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Abstract

In this paper the spatial and temporal evolution of pulsed plasma sheath around a micropatterned surface is investigated using two-dimensional fluid model. The simulation region is considered as a micro-sized tip with rectangular cross section. The effects of rise time on electric field, ion density distributions, and dose of ions impacting the target are studied. It is shown that the plasma sheath has a balloon-like behavior in the early time stages.

Type
Papers
Information
Journal of Plasma Physics , Volume 79 , Issue 5 , October 2013 , pp. 759 - 764
Copyright
Copyright © Cambridge University Press 2013 

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