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Cavity-hollow cathode-sputtering source for titanium films

Published online by Cambridge University Press:  22 January 2010

R. SCHRITTWIESER ,
C. IONITA ,
A. MURAWSKI ,
C. MASZL ,
M. ASANDULESA ,
A. NASTUTA ,
G. RUSU ,
C. DOUAT ,
S. B. OLENICI  and
I. VOJVODIC
...Show all authors
R. SCHRITTWIESER
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria ([email protected])
C. IONITA
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria ([email protected])
A. MURAWSKI
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria ([email protected])
C. MASZL
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria ([email protected])
M. ASANDULESA
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
A. NASTUTA
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
G. RUSU
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
C. DOUAT
Affiliation:
UFR des Sciences, Université Paris Sud 11, Orsay Cedex, France
S. B. OLENICI
Affiliation:
ISAS – Institute for Analytical Sciences, Dortmund, Germany
I. VOJVODIC
Affiliation:
Faculty of Natural Sciences and Mathematics, University of Montenegro, Podgorica, Montenegro
M. DOBROMIR
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
D. LUCA
Affiliation:
Faculty of Physics, Alexandru-Ioan-Cuza University of Iasi, Iasi, Romania
S. JAKSCH
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria ([email protected])
P. SCHEIER
Affiliation:
Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria ([email protected])
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Abstract

A cavity-hollow cathode was investigated as low-cost sputtering source for titanium. An argon discharge is produced inside a hollow cathode consisting of two specifically formed disks of titanium. An additional cavity further enhances the pendulum effect of the electrons. Measurements with small Langmuir probes yielded evidence for the formation of a space charge double layer above the cathode. The sputtered atoms form negatively charged clusters. After further acceleration by the double layer the clusters impinge on the substrates. Titanium thin films were produced on highly oriented pyrolytic graphite. The films were investigated by a scanning tunnel microscope and X-ray photoelectron spectroscopy.

Type
Papers
Information
Journal of Plasma Physics , Volume 76 , Special Issue 3-4: In Honor of Professor Padma Kant Shukla on the Occasion of His 60th Birthday , August 2010 , pp. 655 - 664
Copyright
Copyright © Cambridge University Press 2010

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