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Pull-In Analysis of a Nonlinear Viscoelastic Nanocomposite Microplate Under an Electrostatic Actuation

Published online by Cambridge University Press:  22 March 2012

A. Jalali  and
S. E. Khadem
A. Jalali
Affiliation:
Department of Mechanical and Aerospace Engineering, Tarbiat Modares University, Tehran, Iran
S. E. Khadem*
Affiliation:
Department of Mechanical and Aerospace Engineering, Tarbiat Modares University, Tehran, Iran
*
*Corresponding author ([email protected])
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Abstract

In this paper, the deflection, natural frequency and damping quality factor of a viscoelastic microplate under an electrostatic actuation are investigated. The microplate is assumed as a CNT-reinforced nanocomposite microplate, and an electrostatic actuation is applied on it. The nonlinear equations of motion are derived using the Von-Karman plate theory, and the Kelvin-Voigt viscoelastic model. In order to obtain the material properties of the nanocomposite microplate, the Eshelby–Mori–Tanaka method is implemented. The static pull-in instability of the microplate is obtained. It is shown that the nanocomposite microplate can both increase the deflection and natural frequency of the micro devices. So, one may have a nanocomposite microplate with the same deflection of the SiO2 microplate, while its frequency would be 1.45 times of the SiO2 microplate. This characteristic is highly desirable in microswitches. Also, it is shown that the damping quality factor of the nanocomposite microplate is much greater than SiO2 microplate. This fact limits the implementation of a nanocomposite microplate as a vibrating element of the micro devises. So, there are great beneficial static and frequency response characteristics for nanocomposite microplates. But, it is not recommended for microresonators due to high damping characteristics.

Keywords

NanocompositePull-inQuality factorMicroplate
Type
Articles
Information
Journal of Mechanics , Volume 28 , Issue 1 , March 2012 , pp. 179 - 189
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2012

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References

REFERENCES

1. Zengerle, R., Richter, A. and Sandmaier, H., “A Micro Membrane Pump with Electrostatic Actuation,” Proceedings of Micro Electro Mechanical Systems Conference, Germany (1992).Google Scholar
2. Zhang, X. M., Chau, F. S., Quan, C., Lam, Y. L. and Liu, A. Q., “A Study of the Static Characteristics of a Torsional Micromirror,” Sensors Actuators A, 90, pp. 73–81 (2001).CrossRefGoogle Scholar
3. Hsu, P. C., Mastrangelo, C. H. and Wise, K. D., “A High Sensitivity Polysilicon Diaphragm Condenser Microphone,” Proceedings of MEMS Conference Heidelberg, Germany, (1998).Google Scholar
4. Scheeper, P. R., van der Donk, A. G. H. and Bergveld, P., “A Review of Silicon Microphones,” Sensors Actuators A, 44, pp. 1–11 (1999).Google Scholar
5. Tilmans, H. A. and Legtenberg, R., “Electrostatically Driven Vacuum-Encapsulated Polysilicon Resonators: Part II. Theory and Performance,” Sensors Actuators A, 45, pp. 67–84 (1994).CrossRefGoogle Scholar
6. Francais, O. and Dufour, I., “Normalized Abacus for the Global Behavior of Diaphragms: Pneumatic, Electrostatic, Piezoelectric or Electromagnetic Actuation,” Journal of Modelling and Simulation of Microsystems, 1, pp. 149–160 (1999).Google Scholar
7. Ng, T. Y., Jiang, T. Y., Li, H., Lam, K. Y. and Reddy, J. N., “A Coupled Field Study on the Non-Linear Dynamic Characteristics of an Electrostatic Micropump,” Journal of Sound and Vibration, 273, pp. 989–1006 (2004).CrossRefGoogle Scholar
8. Porfiri, M., “Vibrations of Parallel Arrays of Electrostatically Actuated Microplates,” Journal of Sound and Vibration, 315, pp. 1071–1085 (2008).CrossRefGoogle Scholar
9. Ashrafi, B., Hubert, P. and Vengallatore, S., “Carbon Nanotube-Reinforced Composites as Structural Materials for Microactuators in Microelectromechanical Systems,” Nanotechnology, 17, pp. 4895–4903 (2006).CrossRefGoogle Scholar
10. Shen, G. R., Cheng, Y. T. and Tsai, L. N., “Synthesis and Characterization of Ni–P–CNT Nanocomposite Film for MEMS Applications,” IEEE Transactions on Nanotechnology, 4, pp. 539–547 (2005).Google Scholar
11. Tsai, L. N., Cheng, Y. T., Hsu, W. and Fang, W., “Ni–Carbon Nanotubes Nanocomposite for Robust Microelectromechanical Systems Fabrication,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 24, pp. 205–210 (2006).Google Scholar
12. Fang, W., Chu, H. Y., Hsu, W. K., Cheng, T. W. and Tai, N. H., “Polymer-Reinforced Aligned Multiwalled Carbon Nanotube Composites for Microelectromechanical Systems Applications,” Advances in Materials, 17, pp. 2987–2992 (2005).CrossRefGoogle Scholar
13. Coleman, J. N., Khan, U., Blau, W. J. and Gun'ko, Y. K., “Small But Strong: A Review of the Mechanical Properties of Carbon-Nanotube-Polymer Composites,” Carbon, 44, pp. 1624–1652 (2006).CrossRefGoogle Scholar
14. Coleman, J. N., Khan, U. and Gun'ko, Y. K., “Mechanical Reinforcement of Polymers Using Carbon Nanotubes,” Advances in Materials, 18, pp. 689–706 (2006).Google Scholar
15. Thostenson, E. T., Li, C. and Chou, T. W., “Nanocomposites in Context,” Composites Science and Technology, 65, pp. 491–516 (2005).CrossRefGoogle Scholar
16. Fu, Y. M. and Zhang, J., “Nonlinear Static and Dynamic Responses of an Electrically Actuated Viscoelastic Microbeam,” Acta Mechanica Sinica, 25, pp. 211–218 (2009).CrossRefGoogle Scholar
17. Fu, Y. M., Zhang, J. and Bi, R. G., “Analysis of the Nonlinear Dynamic Stability for an Electrically Actuated Viscoelastic Microbeam,” Microsystem Technologies, 15, pp. 763–769 (2009).CrossRefGoogle Scholar
18. Fu, Y. and Zhang, J., “Active Control of the Nonlinear Static and Dynamic Responses for Piezoelectric Viscoelastic Microplates,” Smart Materials and Structures, 18, 095037 (9pp) (2009).CrossRefGoogle Scholar
19. Zamanian, M., Khadem, S. E. and Mahmoodi, S. N., “Nonlinear Response of a Resonant Viscoelastic Microbeam Under an Electrical Actuation,” Structural Engineering and Mechanics, 35, pp. 387–407 (2010).Google Scholar
20. Iijima, S., “Helical Microtubules of Graphitic Carbon,” Nature, 354, pp. 56–58 (1991).Google Scholar
21. Chen, C. H. and Cheng, C. H., “Effective Elastic Moduli of Misoriented Short-Fiber Composites,” International Journal of Solids and Structures, 33, pp. 2519–2539 (1996).Google Scholar
22. Zhao, X. P., Abdel-Rahman, E. M. and Nayfeh, A. H., “A Reduced-Order Model for Electrically Actuated Microplates,” Journal of Micromechanics and Microengineering, 14, pp. 900–906 (2004).Google Scholar
23. Nayfeh, A. H., An Introduction to Perturbation Techniques, Wiley, New York (1981).Google Scholar
24. Cebon, D. and Ashby, M. F., “Material Selection for Precision Instruments,” Measurement Science and Technology, 5, pp. 296–306 (1994).CrossRefGoogle Scholar
25. Kireitseu, M. V., “Preliminary Results on Rheological and Damping Properties of Nanoparticle-Reinforced Materials,” Annual Transactions of the Nordic Rheology Society, 14 (2006).Google Scholar