Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-17T12:22:30.845Z Has data issue: false hasContentIssue false
  • English
  • Français

On the Design of An Innovative Latch Mechanism in SMIFed Wafer Containers

Published online by Cambridge University Press:  05 May 2011

Wei-Ming Pai ,
Dar-Zen Chen ,
Jyh-Jone Lee  and
Chi-Zer Ho
Wei-Ming Pai*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
Dar-Zen Chen*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
Jyh-Jone Lee*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
Chi-Zer Ho*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
*
* Associate Professor
* Professor
* Associate Professor
* Associate Professor
Get access

Abstract

This paper presents the design process for an innovative latch mechanism in a standard mechanical interfaced (SMIFed) wafer container, in which the manufactured integrated circuits are stored. An innovative latch mechanism is proposed and applied to the wafer container, such that the container door can be latched and air-tightly sealed during storage or transportation. The design process is divided into two stages. In the first stage, an output slot-cam is designed in order to generate decoupled fine motions of the output link. The issue is formulated as an optimization problem where the output link dimensions are optimized to minimize the resultant pin forces subject to an adequate transmission angle. In the second stage, the input slot-cam is designed to achieve that kinetic energy of the elastic gasket on the container lid is absorbed at a uniform rate. Finally, a numerical example and computer simulations are given to demonstrate the results of design process. It is believed that this work could aid in enhancing the performance and reliability of the latch mechanism in the SMIF environment.

Keywords

SMIFWafer containerLatch mechanism.
Type
Articles
Information
Journal of Mechanics , Volume 19 , Issue 3 , September 2003 , pp. 389 - 395
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Parikh, M., Kaempf, U., “SMIF: A Technology for Wafer Cassette Transfer in VLSI Manufacturing,” Solid State Technology, Vol. 27, No. 7, pp. 111–115 (1984).Google Scholar
2.Doche, C., “Wafer Confinement for Control of Contamination in Microelectronics,” Solid State Technology, Vol. 33, No. 8, pp. S1S5 (1990).Google Scholar
3. Book of SEMI Standards, SEMI E19–0697.Google Scholar
4. Book of SEMI Standards, SEMI E62–0999.Google Scholar
5. United States Patent No. 4,674,939.Google Scholar
6. United States Patent No. 4,995,430.Google Scholar
7. United States Patent No. 5,586,585.Google Scholar
8. United States Patent No. 5,607,276.Google Scholar
9. United States Patent No. 5,609,459.Google Scholar
10. United States Patent No. 5,613,821.Google Scholar
11. United States Patent No. 5,711,427.Google Scholar
12. United States Patent No. 5,740,845.Google Scholar
13. United States Patent No. 5,743,424.Google Scholar
14. United States Patent No. 5,752,796.Google Scholar
15. United States Patent No. 5,931,512.Google Scholar
16. United States Patent No. 5,957,292.Google Scholar
17. United States Patent No. 5,988,392.Google Scholar
18.Pai, Wei-Ming, Chen, Dar-Zen, Lee, Jyh-Jone and Wu, Tzong-Ming, “A Decomposition Methodology for Design of Mechanisms from Functional and Structural Perspectives,” Journal of the Chinese Institute of Engineers, Vol. 26, No. 4, pp. 537–543 (2003).CrossRefGoogle Scholar
19.Ananthasuresh, G. K., “Design of Fully Rotatable, Roller-Crank-Driven, Cam Mechanisms for Arbitrary Motion Specifications,” Mechanism and Machine Theory, Vol. 36, No. 4, pp. 445–467 (2001).CrossRefGoogle Scholar
20.Kota, S., and Erdman, A. G., “Motion Control in Product Design,” Mechanical Engineering, Vol. 119, No. 8, pp. 74–77 (1997).Google Scholar
21.Liaw, D. G., “Synthesis of Cam-Link Mechanisms for Exact Position Guidance of Rigid Bodies,” Journal of the Chinese Society of Mechanical Engineers, Vol. 5, No. 1, pp. 27–43 (1984).Google Scholar
22.Mills, J. K., Notash, L. and Fenton, R. G., “Optimal Design and Sensitivity Analysis of Flexible Cam Mechanisms,” Mechanism & Machine Theory, Vol. 28, No. 4, pp. 563–581 (1993).CrossRefGoogle Scholar
23.Yu, Q., and Lee, H. P., “Size Optimization of Cam Mechanisms with Translating Roller Followers,” Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, Vol. 212, No. 5, pp. 381–386 (1998).Google Scholar
24.Bouzakis, K. D., Mitsi, S. and Tsiafis, J., “Computer-aided Optimum Design and NC Milling of Planar Cam Mechanisms,” International Journal of Machine Tools & Manufacture, Vol. 37, No. 8, pp. 1131–1142(1997).CrossRefGoogle Scholar
25.Sadler, J. P. and Yang, Zhijia, “Optimal Design of Cam-Linkage Mechanisms for Dynamic-Force Characteristics,” Mechanism & Machine Theory, Vol. 25, No. 1, pp. 41–57 (1990).CrossRefGoogle Scholar
26.MATLAB, The Language of Technical Computing, Version 6.0.0.88, Release 12 (2000).Google Scholar