Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-24T05:33:42.278Z Has data issue: false hasContentIssue false
  • English
  • Français

Numerical Investigation of Rayleigh, Sezawa and Love Modes in C-Axis Tilted ZNO/SI for Gas and Liquid Multimode Sensor

Published online by Cambridge University Press:  14 November 2019

F. Laidoudi Open the ORCID record for F. Laidoudi [Opens in a new window] ,
F. Boubenider ,
C. Caliendo  and
M. Hamidullah
F. Laidoudi*
Affiliation:
Laboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, (USTHB).Research Center in Industrial Technologies CRTI, P.O.Box64 Cheraga 16014 Algiers, Algeria
F. Boubenider
Affiliation:
Laboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, (USTHB). Algiers, Algeria
C. Caliendo
Affiliation:
Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy
M. Hamidullah
Affiliation:
Institute for Photonics and Nanotechnologies, IFN-CNR, Via Cineto Romano 42, 00156 Rome, Italy
*
*Corresponding author ([email protected])
Get access

Abstract

Finite element analysis is carried out to investigate the characteristics of Rayleigh, Sezawa and Love surface acoustic modes travelling along c-axis tilted ZnO layer on Si (001) half-space. The phase velocity dispersion curves, electromechanical coupling, reflectivity and mass loading sensitivity are studied for different electroacoustic coupling configurations and c-axis tilt angles θ. The behavior of Rayleigh and Sezawa modes operating as gas sensor, was simulated under the hypothesis that the ZnO free surface is covered with a thin polyisobutylene (PIB) film, 0.2 μm thick, able to selectively adsorb volatile gases at atmospheric pressure and room temperature. The sensor sensitivity to gas concentration in air, i.e. the frequency shifts per unit gas concentration, is studied and compared to some common materials used in literature. The obtained results, demonstrate the feasibility of high-frequency multimode micro-sensor based on the c-axis tilted ZnO piezoelectric thin film and operating in both liquid and gaseous environments.

Keywords

Finite element analysispiezoelectric materialsurface acoustic wavesc-tilted ZnOelectroacoustic devices
Type
Research Article
Information
Journal of Mechanics , Volume 36 , Issue 1 , February 2020 , pp. 7 - 18
Copyright
Copyright © 2019 The Society of Theoretical and Applied Mechanics 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

J. K., Na, J. L., Blackshire and S., Kuhr, “Design, fabrication, and characterization of single-element interdigital transducers for NDT applications,” Sensors and Actuators A: Physical, 148(2), pp. 359–365 (2008).CrossRefGoogle Scholar
L., Le Brizoual, O., Elmazria, F., Sarry, M., El Hakiki, A., Talbi and P., Alnot, “High frequency SAW devices based on third harmonic generation,” Ultrasonics, 45(1-4), pp. 100–103 (2006).CrossRefGoogle ScholarPubMed
V. B., Raj, H., Singh, A. T., Nimal, M., Tomar, M. U., Sharma and V., Gupta, “Origin and role of elasticity in the enhanced DMMP detection by ZnO/SAW sensor,” Sensors and Actuators B: Chemical, 207, pp. 375–382 (2015).CrossRefGoogle Scholar
C., Zhang, J. J., Caron and J. F., Vetelino, “The Bleustein–Gulyaev wave for liquid sensing applications,” Sensors and Actuators B: Chemical, 76(1-3), pp. 64–68 (2001).CrossRefGoogle Scholar
C., Caliendo and M., Hamidullah, “A theoretical study of love wave sensors based on ZnO–glass layered structures for application to liquid environments,” Biosensors, 6(4), pp. 59–72 (2016).CrossRefGoogle ScholarPubMed
D., Matatagui, M. J., Fernandez, J., Fontecha, J. P., Santos, I., Gràcia, C., Cané and M. C., Horrillo, “Lovewave sensor array to detect, discriminate and classify chemical warfare agent simulants,” Sensors and Actuators B: Chemical, 175, pp. 173–178 (2012).CrossRefGoogle Scholar
F. M., Zhou, Z., Li, L., Fan, S. Y., Zhang and X. J., Shui, “Experimental study of Love-wave immunosensors based on ZnO/LiTaO3 structures,” Ultrasonics, 50(3), pp. 411–415 (2010).CrossRefGoogle ScholarPubMed
M., Schwartz, Smart materials, 1st edition, CRC press (2008).CrossRefGoogle Scholar
V. I., Anisimkin, I. I., Pyataikin, N. V., Voronova and Y. V., Puchkov, “Temperature characteristics of acoustic modes in SiO 2, LiNbO 3, LiTaO 3, Bi 12 GeO 20, and Bi 12 Si 20 piezoelectric crystal plates,” Journal of Communications Technology and Electronics, 61(1), pp. 76–81 (2016).CrossRefGoogle Scholar
Y. Q., Fu, J. K., Luo, X. Y., Du, A. J., Flewitt, Y., Li, G. H., Markx and W. I., Milne, “Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review,” Sensors and Actuators B: Chemical, 143(2), pp. 606–619 (2010).CrossRefGoogle Scholar
C., Caliendo, S., Sait and F., Boubenider, “Lovemode MEMS devices for sensing applications in liquids,” Micromachines, 7(1), pp. 15–28 (2016).CrossRefGoogle ScholarPubMed
M., Suenaga, E. L., Adler, G. W., Farnell, J. M., Galligan, G. C., Joyce, F. L., Nagy, E. K., Sittig and W. J., Spencer, Physical Acoustics: principles and methods, 1st Edition, Vol. 9. IX, Acad. Press, New York (1972).Google Scholar
B. A., Auld, Acoustic fields and waves in solids, 1st Edition, John Wiley & Sons Inc, New York (1973).Google Scholar
N., Terrien, D., Osmont, D., Royer, F., Lepoutre and A., Déom, “A combined finite element and modal decomposition method to study the interaction of Lamb modes with micro-defects,” Ultrasonics, 46(1), pp. 74–88 (2007).CrossRefGoogle Scholar
R. G., Grimes, J. G., Lewis and H. D., Simon “A shifted block Lanczos algorithm for solving sparse symmetric generalized eigenproblems,” SIAM Journal on Matrix Analysis and Applications, 15(1), pp. 228–272 (1994).CrossRefGoogle Scholar
R., Zemčík and P., Sadílek, “Modal analysis of beam with piezoelectric sensors and actuators” Applied and Computational Mechanics, 1, pp. 381–386 (2007).Google Scholar
U. C., Kaletta and C., Wenger, “FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO2/Si (1 0 0),” Ultrasonics, 54(1), pp. 291–295 (2014).CrossRefGoogle Scholar
C., Zimmermann, P., Mazein, D., Rebiere, C., Dejous, F., Josse and J., Pistre, “A theoretical study of Love wave sensors mass loading and viscoelastic sensitivity in gas and liquid environments,” IEEE Ultrasonics Symposium, 2, pp. 813–816 (2004).Google Scholar
C., Caliendo and M., Hamidullah, “Zero-groupvelocity acoustic waveguides for high-frequency resonators,” Journal of Physics D: Applied Physics, 50(47), pp. 474002–474014 (2017).CrossRefGoogle Scholar
C., Ayela, S. M., Heinrich, F., Josse and I., Dufour, “Resonant microcantilevers for the determination of the loss modulus of thin polymer films,” Journal of Microelectromechanical Systems, 20(4), pp. 788–790 (2011).CrossRefGoogle Scholar
I., Benedek and M.M., Feldstein, Technology of pressure-sensitive adhesives and products, 1st Edition. CRC Press (2008).CrossRefGoogle Scholar
S., Johnson and T., Shanmuganantham “Design and analysis of SAW based MEMS gas sensor for the detection of volatile organic gases,” Carbon, 119(5), pp. 0–041316 (2014).Google Scholar
C., Caliendo, E., Giovine and M., Hamidullah, “Design and fabrication of zero-group-velocity Lamb wave resonator onto silicon nitride/aluminum nitride suspended membrane,” In AIP Conference Proceedings, 1990(1), pp. 020013–020020 (2018).CrossRefGoogle Scholar
M. R. H., Sarker, H., Karim, R., Martinez, D., Delfin, R., Enriquez, M. A. I., Shuvo and Y., Lin, “Temperature measurements using a lithium niobate (LiNbO3) pyroelectric ceramic,” Measurement, 75, pp. 104–110 (2015).CrossRefGoogle Scholar
I. E., Kuznetsova, V. I., Anisimkin, V. V., Kolesov, V. V., Kashin, V. A., Osipenko, S. P., Gubin, S. V., Tkachev, E., Verona, S., Sun and A. S., Kuznetsova, “Sezawa wave acoustic humidity sensor based on graphene oxide sensitive film with enhanced sensitivity,” Sensors and Actuators B: Chemical, 272, pp. 236–242 (2018).CrossRefGoogle Scholar
T., Yanagitani, T., Nohara, M., Matsukawa, Y., Watanabe and T., Otani, “Characteristics of (101∼ 0) and (112∼ 0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges,” IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 52(11), pp. 2140–2145 (2005).CrossRefGoogle Scholar
A., Abdollahi, Z., Jiang and S. A., Arabshahi, “Evaluation on mass sensitivity of SAW sensors for different piezoelectric materials using finite-element analysis,” IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 54(12), pp. 734–737 (2007).CrossRefGoogle ScholarPubMed
Y. J., Hsiao, T. H., Fang, Y. H., Chang, Y. S., Chang and S., Wu, “Surface acoustic wave characteristics and electromechanical coupling coefficient of lead zirconate titanate thin films,” Materials Letters, 60(9-10), pp. 1140–1143 (2006).CrossRefGoogle Scholar
C., Caliendo, “Theoretical investigation of high velocity, temperature compensated Rayleigh waves along AlN/SiC substrates for high sensitivity mass sensors,” Applied Physics Letters, 100(2), pp. 021905–021908 (2012).CrossRefGoogle Scholar
K.Y., Hashimoto, Surface acoustic wave devices in telecommunications: modelling and simulation, 1st Edition, Springer Science & Business Media (2013).Google Scholar
F., Laidoudi, F., Boubenider, M., Mebarki, F., Medjili, F., Bettine, “Numerical Investigation of Quasi-Lamb Modes in C-Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor,” Acoustical Physics, 65 (3), pp. 253–262 (2019)CrossRefGoogle Scholar