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Extraction of Frequency Dependent Macromodels for Mems Squeezed-Film Damping Effects

Published online by Cambridge University Press:  05 May 2011

Yao-Joe Joseph Yang ,
Chih-Ming Chien ,
Mattan Kamon ,
Vladimir L. Rabinovich  and
John R. Gilbert
Yao-Joe Joseph Yang*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
Chih-Ming Chien*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
Mattan Kamon*
Affiliation:
Coventor, Inc., Cambridge, MA, U.S.A.
Vladimir L. Rabinovich*
Affiliation:
Coventor, Inc., Cambridge, MA, U.S.A.
John R. Gilbert*
Affiliation:
Coventor, Inc., Cambridge, MA, U.S.A.
*
*Associate Professor
** Graduate student
*** Project Manager
*** Project Manager
*** Chief Technology Officer
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Abstract

In this paper, an efficient macromodel extraction technique for dynamical MEMS gas damping effects is presented. The technique applies an Arnoldi-based model-order-reduction algorithm to generate low-order macromodels from a FEM approximation of the governing equation of the squeeze-film fluidic damping effect, the Reynolds equation. We demonstrate that this approach is more than 100 times efficient than previous approaches, which solve the Reynolds equation using transient finite-element/finite-difference methods. The generated gas-damping macromodels can be easily inserted into system-level modeling packages, such as SPICE, Saber and Simulink, for transient and frequency coupled-domain analysis. We also demonstrated that the simulated results are in good agreement with experimental results for various MEMS devices.

Keywords

MacromodelSqueeze-film dampingMEMSModel order reduction
Type
Articles
Information
Journal of Mechanics , Volume 21 , Issue 4 , December 2005 , pp. 227 - 234
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2005

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