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Design and Development of a Piezoelectric Actuator for the Scanning Probe Microscope Used in Ultrahigh Vacuum

Published online by Cambridge University Press:  05 May 2011

K.-Y. Huang  and
C.-J. Lee
K.-Y. Huang*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
C.-J. Lee*
Affiliation:
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, R.O.C.
*
*Associate Professor
**Master of Science
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Abstract

This paper is to present the design and development of a piezoelectric actuator for SPM in ultrahigh vacuum (10−7∼10−9 Torr). The measuring probe is installed on a precise scanning actuator, which is further driven by a fast approaching actuator. The precise scanning actuator composed of a piezo-tube with segmented electrodes can realize 3-D precise scanning motions at subnanometer level to move the measuring probe over the measured surface. Because of its stable and smooth actuating behavior, the inchworm actuating principle is selected for the fast approaching actuator, which is build up with two controllable clamping devices and an actuating device. Diverse flexure mechanisms are applied in the actuator to attain frictionless guiding and recovery functions. To realize balanced clamping forces on the scanning tube, each clamping device is integrated with a fine regulating mechanism for clamping force. By applying the theoretical model and the finite element analysis, the relations between force and deflection inside the actuator were investigated to validate its function. The developed actuator has sustained the severe baking and pumping process, and their function and performance were verified experimentally in ultrahigh vacuum.

Keywords

Scanning probe microscopyUltrahigh vacuumPiezoelectric actuatorFine regulating mechanism
Type
Articles
Information
Journal of Mechanics , Volume 23 , Issue 2 , June 2007 , pp. 117 - 126
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2007

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