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Deformation Characteristics in Micromachining of Single Crystal 6H-SiC: Insight into Slip Systems Activation

Published online by Cambridge University Press:  05 March 2020

K. H. Pang ,
R. Zhou  and
A. Roy Open the ORCID record for A. Roy [Opens in a new window]
K. H. Pang
Affiliation:
Surrey Space Centre, University of Surrey, Guildford, GU2 7XH, The UK.
R. Zhou
Affiliation:
Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough, LE11 3TU, The UK.
A. Roy*
Affiliation:
Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough, LE11 3TU, The UK.
*
*Corresponding author ([email protected])
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Abstract

Silicon carbide (SiC) is ideally suitable as a sensor material in harsh environments. Despite the brittleness in the macroscopic scale, plasticity in SiC is observed at small component length-scales. Previous nanoindentation based study combining experiment and numerical approaches of single-crystal 6H-SiC has shown that slip activation is rather complex, and that non-basal slip could potentially dominate the plastic deformation behaviour. In this study, we investigated the local deformation response evolution of shear strain directly under and in the vicinity of the indenter tip. The results show the pyramidal slip families contribute significantly to the deformation process.

Keywords

NanoindentationCrystal plasticitySilicon carbideFinite element analysis
Type
Research Article
Information
Journal of Mechanics , Volume 36 , Issue 2 , April 2020 , pp. 245 - 253
Copyright
Copyright © 2020 The Society of Theoretical and Applied Mechanics

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