Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-24T11:24:33.932Z Has data issue: false hasContentIssue false

Nonlinear Pull-In Characterization of a Nonlocal Nanobeam with an Intermolecular Force

Published online by Cambridge University Press:  01 July 2016

Y.-G. Wang*
Affiliation:
College of ScienceChina Agricultural UniversityBeijing, China
H.-F. Song
Affiliation:
College of ScienceChina Agricultural UniversityBeijing, China
W.-H. Lin
Affiliation:
College of ScienceChina Agricultural UniversityBeijing, China
*
*Corresponding author ([email protected])
Get access

Abstract

This survey examines the geometrically nonlinear bending of a doubly clamped nanobeam that is subjected to combined actions of actuator voltage, prestress, and intermolecular force, with the pull-in instability as the primary objective. A nonlocal Euler-Bernoulli beam model, which takes the small scale effect into account, is developed making use of the principle of virtual displacement on the basis of Eringen's nonlocal theory in conjunction with von Kármán assumption. Due to complexity of the resulting equations, a shooting technique is established through taking the applied voltage as an unknown and the central deflection as a control parameter. This treatment has the capability of tackling the nonlinearities from both the large deformation and electrostatic force as well as the intermolecular force and enables the size dependent deflection response to an applied voltage of the nanobeam to be obtained conveniently. Validation is conducted in numerical examples through direct comparisons with existing solutions to confirm the proposed method. Parametric studies are undertaken addressing the impacts of the nonlocal effect, intermolecular force, residual stress, and geometry of the beam on the pull-in behaviors.

Type
Research Article
Copyright
Copyright © The Society of Theoretical and Applied Mechanics 2016 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Fatikow, S. and Rembold, U., Microsystems Technology and Microrobotics, Springer, Berlin (1997).CrossRefGoogle Scholar
2. Kim, P. and Lieber, C. M., “Nanotube Nanotweezers,” Science, 286, pp. 21482150 (1999).CrossRefGoogle ScholarPubMed
3. Dequesnes, M., Tang, Z. and Aluru, N. R., “Static and Dynamic Analysis of Carbon Nanotube-Based Switches,” Journal of Engineering Materials and Technology, 126, pp. 230237 (2004).CrossRefGoogle Scholar
4. Pelesko, J. A. and Bernstein, D. H., Modeling MEMS and NEMS, Chapman and Hall/CRC, Boca Raton (2002).CrossRefGoogle Scholar
5. Hu, Y. C., Chang, C. M. and Huang, S. C., “Some Design Considerations on the Electrostatically Actuated Microstructures,” Sensors and Actuators A-Physical, 112, pp. 155161 (2004).CrossRefGoogle Scholar
6. Sadeghian, H. and Rezazadeh, G., “Comparison of Generalized Differential Quadrature and Galerkin Methods for the Analysis of Micro-Electro-Mechanical Coupled Systems,” Communication in Nonlinear Science and Numerical Simulation, 14, pp. 28072816 (2009).CrossRefGoogle Scholar
7. Sadeghian, H., Rezazadeh, G. and Osterberg, P. M., “Application of the Generalized Differential Quadrature Method to the Study of Pull-In Phenomena of MEMS Switches,” Journal of Microelectromechanical Systems, 16, pp. 13341340 (2007).CrossRefGoogle Scholar
8. Chowdhury, S., Ahmadi, M. and Miller, W. C., “A Closed-Form Model for the Pull-In Voltage of Electrostatically Actuated Cantilever Beams,” Journal of Micromechanics and Microengineering, 15, pp. 756763 (2005).CrossRefGoogle Scholar
9. Nemirovsky, Y. and Bochobza-Degani, O., “A Methodology and Model for the Pull-In Parameters of Electrostatic Actuators,” Journal of Microelectromechanical Systems, 10, pp. 601615 (2001).CrossRefGoogle Scholar
10. Pamidighantam, S., Puers, R., Baert, K. and Tilmans, H. A. C., “Pull-In Voltage Analysis of Electrostatically Actuated Beam Structures with Fixed-Fixed and Fixed-Free End Conditions,” Journal of Micromechanics and Microengineering, 12, pp. 458464 (2002).CrossRefGoogle Scholar
11. Lin, W. H. and Zhao, Y. P., “Nonlinear Behavior for Nanoscale Electrostatic Actuators with Casimir Force,” Chaos, Solitons and Fractals, 23, pp. 17771785 (2005).CrossRefGoogle Scholar
12. Lin, W. H. and Zhao, Y. P., “Dynamic Behavior of Nanoscale Electrostatic Actuators,” Chinese Physics Letters, 20, pp. 20702073 (2003).Google Scholar
13. Wang, Y. G. and Lin, W. H., “Bending and Vibration of an Electrostatically Actuated Circular Microplate in Presence of Casimir Force,” Applied Mathematical Modelling, 35, pp. 23482357 (2011).CrossRefGoogle Scholar
14. Jia, X. L., Yang, J. and Kitipornchai, S., “Pull-In Instability of Geometrically Nonlinear Micro-Switches Under Electrostatic and Casimir Forces,” Acta Mechanica, 218, pp. 161174 (2011).CrossRefGoogle Scholar
15. Ramezani, A., Alasty, A. and Akbari, J., “Closed-Form Solutions of the Pull-In Instability in Nano-Cantilevers Under Electrostatic and Intermolecular Surface Forces,” International Journal of Solids and Structures, 44, pp. 49254941 (2007).CrossRefGoogle Scholar
16. Beni, Y. T., Koochi, A., Kazemi, A. S. and Abadyan, M., “Modeling the Influence of Surface Effect and Molecular Force on Pull-In Voltage of Rotational Nano-Micro Mirror Using 2-DOF Model,” Canadian Journal of Physics, 90, pp. 963974 (2012).CrossRefGoogle Scholar
17. Koochi, A., Kazemi, A. S., Khandani, F. and Abadyan, M., “Influence of Surface Effects on Size-Dependent Instability of Nano-Actuators in the Presence of Quantum Vacuum Fluctuations,” Physica Scripta, 85, p. 035804 (2012).CrossRefGoogle Scholar
18. Koochi, A., Hosseini-Toudeshky, H., Ovesy, H. R. and Abadyan, M., “Modeling the Influence of Surface Effect on Instability of Nano-Cantilever in Presence of Van Der Waals Force,” International Journal of Structural Stability and Dynamics, 13, 1250072 (2013).CrossRefGoogle Scholar
19. Koochi, A. and Hosseini-Toudeshky, H., “Coupled Effect of Surface Energy and Size Effect on the Static and Dynamic Pull-In Instability of Narrow Nano-Switches,” International Journal of Applied Mechanics, 7, 1550064 (2015).CrossRefGoogle Scholar
20. Chaterjee, S. and Pohit, G., “A Large Deflection Model for the Pull-In Analysis of Electrostatically Actuated Microcantilever Beams,” Journal Sound and Vibration, 322, pp. 969986 (2009).CrossRefGoogle Scholar
21. Wang, Y. G., Lin, W. H., Feng, Z. J. and Li, X. M., “Characterization of Extensional Multi-Layer Microbeams in Pull-In Phenomenon and Vibrations,” International Journal of Mechanical Science, 54, pp. 225233 (2012).CrossRefGoogle Scholar
22. Rochus, V., “Finite Element Modelling of Strong Electro-Mechanical Coupling in MEMS,” Ph.D. Dissertation, University of Liège, Liège, Belgium (2006).Google Scholar
23. Koochi, A., Kazemi, A. S., Beni, Y. T., Yekrangi, A. and Abadyan, M., “Theoretical Study of the Effect of Casimir Attraction on the Pull-In Behavior of Beam-Type NEMS Using Modified Adomian Method,” Physica E-Low-Dimensional Systems and Nanostructures, 43, pp. 625632 (2010).CrossRefGoogle Scholar
24. Abdi, J., Koochi, A., Kazemil, A. S. and Abadyan, M., “Modeling the Effects of Size Dependence and Dispersion Forces on the Pull-In Instability of Electrostatic Cantilever NEMS Using Modified Couple Stress Theory,” Smart Materials and Structures, 20, 055011 (2011).CrossRefGoogle Scholar
25. Soroush, R., Koochi, A., Kazemi, A. S., Noghrehabadi, A., Haddadpour, H. and Abadyan, M., “Investigating the Effect of Casimir and Van Der Waals Attractions on the Electrostatic Pull-In Instability of Nano-Actuators,” Physica Scripta, 82, 045801 (2010).CrossRefGoogle Scholar
26. Soroush, R., Koochi, A., Kazemi, A. S. and Abadyan, M., “Modeling the Effect of Van Der Waals Attraction on the Instability of Electrostatic Cantilever and Doubly-Supported Nano-Beams Using Modified Adomian Method,” International Journal of Structural Stability and Dynamics, 12, 1250036 (2012).CrossRefGoogle Scholar
27. Batra, R. C., Porfiri, M. and Spinello, D., “Reduced-Order Models for Microelectromechanical Rectangular and Circular Plates Incorporating the Casimir Force,” International Journal of Solids and Structures, 45, pp. 35583583 (2008).CrossRefGoogle Scholar
28. Abdel-Rahman, E. M., Younis, M. I. and Nayfeh, A. H., “Characterization of the Mechanical Behavior of an Electrically Actuated Microbeam,” Journal of Micromechanics and Microengineering, 12, pp. 759766 (2002).CrossRefGoogle Scholar
29. Wang, Y. G. and Lin, W. H., “Pull-In Voltage Analysis for an Electrostatically Actuated Extensional Microbeam with Large Deflection,” Zeitschrift Fur Angewandte Mathematik Und Mechanik, 90, pp. 211218 (2010).CrossRefGoogle Scholar
30. Batra, R. C., Porfiri, M. and Spinello, D., “Electromechanical Model of Electrically Actuated Narrow Microbeams,” Journal of Microelectromechanical Systems, 15, pp. 11751189 (2006).CrossRefGoogle Scholar
31. Yang, J., Jia, X. L. and Kitipornchai, S., “Pull-In Instability of Nano-Switches Using Nonlocal Elasticity Theory,” Journal of Physics D-Applied Physics, 41, pp. 295302 (2008).CrossRefGoogle Scholar
32. Batra, R. C., Porfiri, M. and Spinello, D., “Review of Modeling Electrostatically Actuated Microelectromechanical Systems,” Smart Materials and Structures, 16, pp. 2331 (2007).CrossRefGoogle Scholar
33. Li, Y., Qin, Q. and Wang, L., “Size Effect on the Static Behavior of Electrostatically Actuated Microbeams,” Acta Mechanica Sinica, 27, pp. 445451 (2011).Google Scholar
34. Beni, Y. T., Koochi, A. and Abadyan, M., “Theoretical Study of the Effect of Casimir Force, Elastic Boundary Conditions and Size Dependency on the Pull-In Instability of Beam-Type NEMS,” Physica E-Low-Dimensional Systems and Nanostructures, 43, pp. 979988 (2011).CrossRefGoogle Scholar
35. Baghani, M., “Analytical Study on Size-Dependent Static Pull-In Voltage of Microcantilevers Using the Modified Couple Stress Theory,” International Journal of Engineering Science, 54, pp. 99105 (2012).CrossRefGoogle Scholar
36. Rahaeifard, M., Kahrobaiyan, M. H., Asghari, M. and Ahmadian, M. T., “Static Pull-In Analysis of Microcantilevers Based on the Modified Couple Stress Theory,” Sensors and Actuators A-Physical, 171, pp. 370374 (2011).CrossRefGoogle Scholar
37. Rahaeifard, M., Kahrobaiyan, M. H., Ahmadian, M. T. and Firoozbakhsh, K., “Size-Dependent Pull-In Phenomena in Nonlinear Microbridges,” International Journal of Mechanical Science, 54, pp. 306310 (2012).CrossRefGoogle Scholar
38. Mobki, H., Sadeghi, M. H., Rezazadeh, G., Fathalilou, M. and Keyvani-janbahan, A. A., “Nonlinear Behavior of a Nano-Scale Beam Considering Length Scale-Parameter,” Applied Mathematical Modelling, 38, pp. 18811895 (2014).CrossRefGoogle Scholar
39. Rokni, H., Seethaler, R. J., Milani, A. S., Hosseini-Hashemi, S. and Li, X. F., “Analytical Closed-Form Solutions for Size-Dependent Static Pull-In Behavior in Electrostatic Micro-Actuators Via Fredholm Integral Equation,” Sensors and Actuators A-Physical, 190, pp. 3243 (2013).CrossRefGoogle Scholar
40. Mohammadi, V., Ansari, R., Shojaei, M. F., Gholami, R. and Sahmani, S., “Size-Dependent Dynamic Pull-In Instability of Hydrostatically and Electrostatically Actuated Circular Microplates,” Nonlinear Dynamics, 73, pp. 15151526 (2013).CrossRefGoogle Scholar
41. Wang, B., Zhou, S., Zhao, J. and Chen, X., “Size-Dependent Pull-In Instability of Electrostatically Actuated Microbeam-Based MEMS,” Journal of Micromechanics and Microengineering, 21, pp. 161168 (2011).CrossRefGoogle Scholar
42. Eringen, A. C., Nonlocal Continuum Field Theories, Springer-Verlag, New York (2002).Google Scholar
43. Peddieson, J., Buchanan, G. R. and McNitt, R. P., “Application of Nonlocal Continuum Models to Nanotechnology,” International Journal of Engineering Science, 41, pp. 305312 (2003).CrossRefGoogle Scholar
44. Taghavi, N. and Nahvi, H., “Pull-In Instability of Cantilever and Fixedefixed Nano-Switches,” European Journal of Mechanics A-Solids, 41, pp. 123133 (2013).CrossRefGoogle Scholar
45. Mousavi, T., Bornassi, S. and Haddadpour, H., “The Effect of Small Scale on the Pull-In Instability of Nano-Switches Using DQM,” International Journal of Solids and Structures, 50, pp. 11931202 (2013).CrossRefGoogle Scholar
46. Fakhrabadi, M. M. S., Rastgoo, A. and Ahmadian, M. T., “Size-Dependent Instability of Carbon Nanotubes Under Electrostatic Actuation Using Nonlocal Elasticity,” International Journal of Mechanical Science, 80, pp. 144152 (2014).CrossRefGoogle Scholar
47. Miandoab, E. M., Pishkenari, H. N., Yousefi-Koma, A. and Hoorzad, H., “Polysilicon Nano-Beam Model Based on Modified Couple Stress and Eringen's Nonlocal Elasticity Theories,” Physica E-Low-Dimensional Systems and Nanostructures, 63, pp. 223228 (2014).CrossRefGoogle Scholar
48. Miandoab, E. M., Yousefi-Koma, A. and Pishkenari, H. N., “Nonlocal and Strain Gradient Based Model for Electrostatically Actuated Silicon Nano-Beams,” Microsystem Technologies, 21, pp. 457464 (2015).CrossRefGoogle Scholar
49. Najar, F., El-Borgi, S., Reddy, J. N. and Mrabet, K., “Nonlinear Nonlocal Analysis of Electrostatic Nanoactuators,” Composite Structures, 120, pp. 117128 (2015).CrossRefGoogle Scholar
50. Sedighi, H. M., Daneshmand, F. and Abadyan, M., “Modeling the Effects of Material Properties on the Pull-In Instability of Nonlocal Functionally Graded Nano-Actuators,” Zeitschrift Fur Angewandte Mathematik Und Mechanik, DOI: 10.1002/zamm.201400160 (2015).CrossRefGoogle Scholar
51. Sedighi, H. M., Keivani, M. and Abadyan, M., “Modified Continuum Model for Stability Analysis of Asymmetric FGM Double-Sided NEMS: Corrections Due to Finite Conductivity, Surface Energy and Nonlocal Effect,” Composites Part B, 83, pp. 117133 (2015).CrossRefGoogle Scholar
52. Eringen, A. C., “On Differential Equations of Nonlocal Elasticity and Solutions of Screw Dislocation and Surface Waves,” Journal of Applied Physics, 54, pp. 47034710 (1983).CrossRefGoogle Scholar
53. Li, S. R. and Zhou, Y. H., “Shooting Method for Non-Linear Vibration and Buckling of Heated Orthotropic Plates,” Journal Sound and Vibration, 248, pp. 379386 (2001).CrossRefGoogle Scholar
54. William, H. P., Saul, A. T., William, T. V. and Brian, P. F., Numerical Recipes - The Art of Scientific Computing, Cambridge University Press, New York (1986).Google Scholar