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Uniformity, composition, and surface tension in solution deposited PbZrxTi1-xO3 films

Published online by Cambridge University Press:  03 March 2011

A. Etin ,
G.E. Shter ,
V. Gelman  and
G.S. Grader
A. Etin
Affiliation:
Chemical Engineering Department, Technion, Haifa 32000, Israel
G.E. Shter
Affiliation:
Chemical Engineering Department, Technion, Haifa 32000, Israel
V. Gelman
Affiliation:
Chemical Engineering Department, Technion, Haifa 32000, Israel
G.S. Grader*
Affiliation:
Chemical Engineering Department, Technion, Haifa 32000, Israel
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

High quality, uniform PbZrxTi1-xO3(PZT) films were prepared on the 4 inch wafers by chemical solution deposition (CSD) of 1,3-propanediol precursors. Film uniformity was studied as a function of deposition conditions including spinning rates and co-solvents. Measurements of the surface tension and composition evolution during evaporation and spinning stages showed that the surface tension increases significantly when the co-solvent is nearly completely evaporated. The evaporation of the propanol co-solvent and volatile by-products occurs within the first 5 s of spinning giving rise to defects, whereas octanol is slowly evaporated during 60 s producing uniform coatings. Other co-solvents such as hexanol and pentanol produced uniform films as well. Therefore stabilization of the surface tension in the initial spinning stage is a key to prevent the defect formation. These findings facilitate the deposition of uniform PZT films over large substrates by a simple, scalable, and cost-effective process.

Keywords

FerroelectricFilmSolution deposition
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 1 , January 2007 , pp. 103 - 112
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1Muralt, P.: PZT thin films for microsensors and actuators, where do we stand? IEEE T. Ultrason. Ferr. 47, 903 (2000).CrossRefGoogle ScholarPubMed
2Schwartz, R.W., Schneller, T., and Waser, R.: Chemical solution deposition of electronic oxide films. J.C.R. Chimie. 7, 433 (2004).CrossRefGoogle Scholar
3Budd, K.D., Dey, S.K., and Payne, D.A.: Sol-gel processing of PbTiO3, PbZrO3, PZT, and PLZT thin films. Brit. Ceram. Proc. 36, 107 (1985).Google Scholar
4Yi, G. and Sayer, M.: An acetic acid/water based sol-gel PZT process. J. Sol-Gel Sci. Technol. 6, 65 (1996).CrossRefGoogle Scholar
5Phillips, N.J., Calzada, M.L., and Milne, S.J.: Diol-based sol-gel system for the production of thin films of PbTiO3 J. Mater. Chem. 1, 893 (1991).CrossRefGoogle Scholar
6Tu, Y.L. and Milne, S.J.: Influence of sol synthesis conditions on the electrical properties of Pb(Zr,Ti)O3 thin films. J. Mater. Sci. Lett. 14, 885 (1995).CrossRefGoogle Scholar
7Tu, Y.L. and Milne, S.J.: A study of process variables on the properties of PZT films produced by a single-layer sol-gel technique. J. Mater. Sci. 30, 2507 (1995).CrossRefGoogle Scholar
8Sriprang, N., Kaewchinda, D., Kennedy, J.D., and Milne, S.J.: Processing and sol chemistry of a triol-based sol-gel route for preparing lead zirconate titanate thin films. J. Am. Ceram. Soc. 83, 1914 (2000).CrossRefGoogle Scholar
9Etin, A., Shter, G.E., Reisner, G.M., Baltianski, S., and Grader, G.S.: Controlled elemental depth profile in sol-gel derived PZT films. J. Am. Ceram. Soc. 89, 2387 (2006).CrossRefGoogle Scholar
10Etin, A., Shter, G.E., Reisner, G.M., and Grader, G.S.: Interrelation of ferroelectricity, morphology and thickness in sol-gel derived PZT films. J. Am. Ceram. Soc. (2006, in press).Google Scholar
11Birnie, D.P.: Rational solvent selection strategies to combat striation formation during spin coating of thin films. J. Mater. Res. 16, 1145 (2001).CrossRefGoogle Scholar
12Wu, A., Salvado, I.M. Miranda, Vilarinho, P.M., Baptista, J.L., and Silvestre, A.J.D.: Lead zirconate titanate stable stock solution: Characterization and applications. J. Sol-Gel. Sci. Technol. 19, 671 (2000).CrossRefGoogle Scholar
13Calzada, M.L., Sirera, R., Carmona, F., and Jimenez, B.: Investigations of a diol-based sol-gel process for the preparation of lead titanate materials. J. Am. Ceram. Soc. 78, 1802 (1995).CrossRefGoogle Scholar
14Livage, J. and Sanchez, C.: Sol-gel chemistry. J. Non-Cryst. Solids 145, 11 (1992).CrossRefGoogle Scholar
15Kemmit, T. and Daglish, M.: Decomposition of coordinated acetylacetonate in lead zirconate titanate (PZT) precursor solutions. Inorg. Chem. 37, 2063 (1998).CrossRefGoogle Scholar
16Colthup, N.B., Daly, L.H., and Wiberley, S.E.: Introduction to Infrared and Raman Spectroscopy 3rd ed. (Academic Press, UK, 1990).Google Scholar
17Huang, Y. and Chou, K.: Studies on the spin coating process of silica films. Ceram. Int. 29, 485 (2003).CrossRefGoogle Scholar
18Haas, D.E. and Birnie, D.P.: Evaluation of thermocapillary driving forces in the development of striations during the spin coating process. J. Mater. Sci. 37, 2109 (2002).CrossRefGoogle Scholar
19Birnie, D.P.: Combined flow and evaporation during spin coating of complex solutions. J. Non-Cryst. Solids 218, 174 (1997).CrossRefGoogle Scholar
20Scriven, L.E. and Sternling, C.V.: Wine fingers. Nature 187, 186 (1960).CrossRefGoogle Scholar
21CRC Handbook of Chemistry and Physics, edited by Lide, D.R. (Internet Version 2006, http://www.hbcpnetbase.com).Google Scholar
22Emslie, A.G., Bonner, F.T., and Peck, L.G.: Flow of a viscous liquid on a rotating disk. J. Appl. Phys. 29, 858 (1958).CrossRefGoogle Scholar