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Two interferometric methods for the mechanical characterization of thin films by bulging tests. Application to single crystal of silicon

Published online by Cambridge University Press:  31 January 2011

E. Bonnotte ,
P. Delobelle ,
L. Bornier ,
B. Trolard  and
G. Tribillon
E. Bonnotte
Affiliation:
Laboratoire de Mécanique Appliquée R. Chaléat, UA CNRS, UFR Sciences et Techniques, 24 chemin de l'Epitaphe, 25030 Besancon Cedex, France
P. Delobelle
Affiliation:
Laboratoire de Mécanique Appliquée R. Chaléat, UA CNRS, UFR Sciences et Techniques, 24 chemin de l'Epitaphe, 25030 Besancon Cedex, France
L. Bornier
Affiliation:
Laboratoire de Mécanique Appliquée R. Chaléat, UA CNRS, UFR Sciences et Techniques, 24 chemin de l'Epitaphe, 25030 Besancon Cedex, France
B. Trolard
Affiliation:
Laboratoire d'Optique, UA CNRS, UFR Sciences et Techniques, Route de Gray, La Bouloie, 25030 Besancon Cedex, France
G. Tribillon
Affiliation:
Laboratoire d'Optique, UA CNRS, UFR Sciences et Techniques, Route de Gray, La Bouloie, 25030 Besancon Cedex, France
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Abstract

Two optical methods are presented for the mechanical characterization of thin films, namely real time holographic interferometry and a fringe projection method called “contouring.” These two methods are coupled to the interferometry by the phase measurements, thus allowing the displacement field to be measured at all points on the membrane. We discuss the solutions retained in terms of their precision and sensitivity. These methods are then applied to membrane bulging tests, a type of test that is widely used in micro-mechanical studies. The measurements are performed on silicon single crystal and the results are compared to the solutions calculated by finite element methods. In both cases, the good agreement between theory and experiments allows the experimental apparatus to be validated.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 9 , September 1997 , pp. 2234 - 2248
Copyright
Copyright © Materials Research Society 1997

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References

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