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Two different low friction mechanisms of diamond-like carbon with silicon coatings formed by plasma-assisted chemical vapor deposition

Published online by Cambridge University Press:  31 January 2011

K. Oguri  and
T. Arai
K. Oguri
Affiliation:
Toyota Central Research and Development Laboratories, Inc., 41-1, Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
T. Arai
Affiliation:
Toyota Central Research and Development Laboratories, Inc., 41-1, Aza Yokomichi, Oaza Nagakute, Nagakute-cho, Aichi-gun, Aichi-ken, 480-11, Japan
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Abstract

Diamond-like carbon with silicon (DLC-Si) coatings formed by plasma-assisted chemical vapor deposition showed low friction coefficients of the order of 0.01 against steel without a lubricant, not only in dry atmosphere but also in humid atmosphere, where conventional DLC coatings showed higher friction coefficients of 0.1–0.2. DLC-Si coatings with 1 μm thickness deposited on steel were slid against steel using a conventional ball-on-disk type of apparatus to compare with a low friction mechanism of DLC-Si in dry and humid atmospheres. Analyses of wear scars indicated that formation and/or transfer of graphite-like carbon including hydrogen that originated in a DLC-Si coating occurred in dry atmosphere, while oxidation of contained silicon with water vapor formed silica-sol by sliding in humid atmosphere. The latter, peculiar to DLC-Si, was considered to cause the low friction coefficient in humid atmosphere through adsorbed water on silica.

Type
Communications
Information
Journal of Materials Research , Volume 7 , Issue 6 , June 1992 , pp. 1313 - 1316
Copyright
Copyright © Materials Research Society 1992

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