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Structure and bonding studies of the C:N thin films produced by rf sputtering method

Published online by Cambridge University Press:  31 January 2011

C. J. Torng ,
J. M. Sivertsen ,
J. H. Judy  and
C. Chang
C. J. Torng
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
J. M. Sivertsen
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, Minneapolis, Minnesota 55455
J. H. Judy
Affiliation:
Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota 55455
C. Chang
Affiliation:
Information Magnetic Corporation, 9177 Sky Park Court, San Diego, California 92123
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Abstract

Thin C:N films were prepared by rf diode sputtering of a graphite target in a mixed argon/nitrogen plasma. We have observed a systematic variation of the properties of these C:N films with an increase in the nitrogen partial pressure. XPS, AES, and TEM studies show that nitrogen will stabilize the diamond sp3 bonding. From XPS studies, we found that the density of our C:N films is increased from 1.37 × 1023 atoms/cm3 to 1.63 × 1023 atoms/cm3 using a 100% nitrogen plasma. The energy gap of our nitrogen carbon also shows an increase from 1.1 eV to 1.4 eV using a 100% nitrogen plasma. The mechanical properties also are shown to be enhanced for certain applications. By using the same method, we can also show that it can produce 100% amorphous C:N films which are more diamond-like as compared with other methods.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2490 - 2496
Copyright
Copyright © Materials Research Society 1990

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