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The Snomipede: A parallel platform for scanning near-field photolithography

Published online by Cambridge University Press:  25 November 2011

Ehtsham ul-Haq ,
Zhuming Liu ,
Yuan Zhang ,
Shahrul A. Alang Ahmad ,
Lu Shin Wong ,
Jamie K. Hobbs ,
Graham J. Leggett ,
Jason Micklefield ,
Clive J. Roberts  and
John M.R. Weaver
Ehtsham ul-Haq
Affiliation:
Department of Chemistry, University of Sheffield, Sheffield S3 7HF, United Kingdom
Zhuming Liu
Affiliation:
School of Pharmacy, University of Nottingham, Nottingham NG7 2RD, United Kingdom
Yuan Zhang
Affiliation:
Department of Electronics and Electrical Engineering, University of Glasgow, Glasgow G12 8LT, United Kingdom
Shahrul A. Alang Ahmad
Affiliation:
Department of Chemistry, Faculty of Science, Universiti Putra Malaysia, 43400 UPM Serdang, Selangor, Malaysia
Lu Shin Wong
Affiliation:
School of Chemistry and Manchester Interdisciplinary Biocentre, The University of Manchester, Manchester M1 7DN, United Kingdom
Jamie K. Hobbs
Affiliation:
Department of Physics and Astronomy, University of Sheffield, Sheffield S3 7RH, United Kingdom
Graham J. Leggett*
Affiliation:
Department of Chemistry, University of Sheffield, Sheffield S3 7HF, United Kingdom
Jason Micklefield
Affiliation:
School of Chemistry, The University of Manchester, Manchester M13 9PL, United Kingdom; and Manchester Interdisciplinary Biocentre, The University of Manchester, Manchester M1 7DN, United Kingdom
Clive J. Roberts
Affiliation:
School of Pharmacy, University of Nottingham, Nottingham NG7 2RD, United Kingdom
John M.R. Weaver
Affiliation:
Department of Electronics and Electrical Engineering, University of Glasgow, Glasgow G12 8LT, United Kingdom
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Using scanning near-field lithography (SNP), it is possible to pattern molecules at surfaces with a resolution as good as 9 nm [M. Montague, R. E. Ducker, K. S. L. Chong, R. J. Manning, F. J. M. Rutten, M. C. Davies and G. J. Leggett, Langmuir23 (13), 7328–7337 (2007)]. However, in common with other scanning probe techniques, SNP has previously been considered a serial process, hindering its use in many applications. IBM’s “Millipede” addresses this problem by utilizing an array of local probes operating in parallel. Here, we describe the construction of two instruments (Snomipedes) that integrate near-field optical methods into the parallel probe paradigm and promise the integration of top–down and bottom–up fabrication methods over macroscopic areas. Both are capable of performing near-field lithography with 16 probes in parallel spanning approximately 2 mm. The instruments can work in both ambient and liquid environments, key to many applications in nanobiology. In both, separate control of writing is possible for each probe. We demonstrate the deprotection of self-assembled monolayers of alkylsilanes with photocleavable protecting groups and subsequent growth of nanostructured polymer brushes from these nanopatterned surfaces by atom-transfer radical polymerization.

Keywords

Self-assemblyNanostructureScanning probe microscopy
Type
Invited Feature Paper
Information
Journal of Materials Research , Volume 26 , Issue 24 , 28 December 2011 , pp. 2997 - 3008
Copyright
Copyright © Materials Research Society 2011

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