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Restructuring tungsten thin films into nanowires and hollow square cross-section microducts

Published online by Cambridge University Press:  03 March 2011

Prahalad M. Parthangal ,
Richard E. Cavicchi ,
Christopher B. Montgomery ,
Shirley Turner  and
Michael R. Zachariah
Prahalad M. Parthangal
Affiliation:
University of Maryland, College Park, Maryland 20742; and National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Richard E. Cavicchi
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Christopher B. Montgomery
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Shirley Turner
Affiliation:
National Institute of Standards and Technology, Gaithersburg, Maryland 20899
Michael R. Zachariah*
Affiliation:
University of Maryland, College Park, Maryland 20742; and National Institute of Standards and Technology, Gaithersburg, Maryland 20899
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

We report on the growth of nanowires and unusual hollow microducts of tungsten oxide by thermal treatment of tungsten films in a radio frequency H2/Ar plasma at temperatures between 550 and 620 °C. Nanowires with diameters of 10–30 nm and lengths between 50 and 300 nm were formed directly from the tungsten film, while under certain specific operating conditions hollow microducts having edge lengths∼0.5 μm and lengths between 10 and 200 μm were observed. Presence of a reducing gas such as H2 was crucial in growing these nanostructures as were trace quantities of oxygen, which was necessary to form a volatile tungsten species. Preferential restructuring of the film surface into nanowires or microducts appeared to be influenced significantly by the rate of mass transfer of gas-phase species to the surface. Nanowires were also observed to grow on tungsten wires under similar conditions. A surface containing nanowires, annealed at 500 °C in air, exhibited the capability of sensing trace quantities of nitrous oxides (NOx).

Keywords

NanofiberSelf-assemblySensor
Type
Rapid Communications
Information
Journal of Materials Research , Volume 20 , Issue 11 , November 2005 , pp. 2889 - 2894
Copyright
Copyright © Materials Research Society 2005

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