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Reactions between liquid silicon and vitreous silica

Published online by Cambridge University Press:  31 January 2011

Zhensheng Liu  and
Torbjörn Carlberg
Zhensheng Liu
Affiliation:
Department of Casting of Metals, Royal Institute of Technology, S-100 44 Stockholm, Sweden
Torbjörn Carlberg
Affiliation:
Department of Casting of Metals, Royal Institute of Technology, S-100 44 Stockholm, Sweden
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Abstract

Oxygen incorporation in silicon crystals during Czochralski growth is dependent on many factors, of which the dissolution of the silica crucible is of great importance. In this paper the reactions between vitreous silica and molten silicon have been analyzed, both in sealed ampoules and in Czochralski crucibles. It was found that the vitreous silica crystallizes to cristobalite by lateral growth. For this reaction to occur it is necessary that liquid silicon is present. The vitreous silica dissolves and the cristobalite grows with a thin layer of liquid silicon between them. Different oxygen concentrations in the melt in equilibrium with the amorphous and crystallized silica are necessary for the reaction to proceed. The oxygen flux in the melt is dependent upon the dissolution of both vitreous silica and cristobalite as well as the reaction between these phases.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 2 , February 1992 , pp. 352 - 358
Copyright
Copyright © Materials Research Society 1992

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