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Pulsed laser deposition of amorphous diamond-like carbon films with ArF (193 nm) excimer laser

Published online by Cambridge University Press:  03 March 2011

Fulin Xiong ,
Y.Y. Wang ,
V. Leppert  and
R.P.H. Chang
Fulin Xiong
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 Sheridan Road, Evanston, Illinois 60208
Y.Y. Wang
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 Sheridan Road, Evanston, Illinois 60208
V. Leppert
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 Sheridan Road, Evanston, Illinois 60208
R.P.H. Chang
Affiliation:
Department of Materials Science and Engineering and Materials Research Center, Northwestern University, 2225 Sheridan Road, Evanston, Illinois 60208
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Abstract

We have deposited hydrogen-free diamond-like amorphous carbon films by ArF (193 nm) pulsed laser ablation of graphite. The deposition process is performed with a laser power density of only 5 × 108 W/cm2 at room temperature without any auxiliary energy source incorporation. The resulting films possess remarkable physical, optical, and mechanical properties that are close to those of diamond and distinct from the graphite target used. The films have a mechanical hardness up to 38 GPa, an optical energy band gap of 2.6 eV, and excellent thermal stability. Analysis of electron energy loss spectroscopy reveals the domination of diamond-type tetrahedral bonding structure in the films with the sp3 bond fraction over 95%. Compared with other reported results of pulsed-laser-deposited diamond-like carbon films, our experimental results confirm that the laser wavelength or photon energy plays a crucial role in controlling the properties of the pulsed-laser-deposited diamond-like carbon films.

Type
Articles
Information
Journal of Materials Research , Volume 8 , Issue 9 , September 1993 , pp. 2265 - 2272
Copyright
Copyright © Materials Research Society 1993

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