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The positive roles of metallic droplets in deposition of alloy films by cathodic arc plasma deposition

Published online by Cambridge University Press:  31 January 2011

She-Guan Wang ,
Xin-De Bai ,
Bao-Chu Wang  and
Yu-Dian Fan
She-Guan Wang
Affiliation:
Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
Xin-De Bai
Affiliation:
Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
Bao-Chu Wang
Affiliation:
Department 7, Central Iron and Steel Research Institute, Beijing, 100081, People's Republic of China
Yu-Dian Fan
Affiliation:
Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People's Republic of China
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Abstract

The roles of metallic droplets, which generated from the cathodic arc spot holes in the technology of Cathodic Arc Plasma Deposition (CAPD), are investigated by SEM, TEM, image analysis apparatus, and electronic probe energy spectrum analysis. The results show that though many papers in recent years are devoted to eliminate them, the metallic droplets, including the macrodroplets, have many important positive roles in the preparation of alloy films: they are the main factor to transfer the original composition of alloy cathodic target to the alloy thick films; they preserve the high deposition rate of CAPD to form the basic characteristics of the microstructure and to affect the pore ratios of the films; they also preserve the high melting point elements in the alloy films, and therefore preserve the corrosion resistance of the alloy in the films. The macrodroplets can be eliminated by raising the substrate temperature properly, which is permitted in some cases, such as depositing alloy films onto middle carbon steel as an anticorrosion system, etc.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 5 , May 1996 , pp. 1137 - 1143
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

1.Baouchi, A.W. and Perry, A. J., Surf. Coating Technol. 49, 253 (1991).CrossRefGoogle Scholar
2.Boxman, R. L., Goldsmith, S., Shaulev, S., Yaloz, H., and Brosh, N., Thin Solid Films 139, 41 (1986).CrossRefGoogle Scholar
3.Panjan, P., Zabkarand, A., and Navinsek, B., Vacuum 40 (1/2), 161 (1990).CrossRefGoogle Scholar
4.Akari, K., Tamagaki, H., Kumakiri, T., Tsuji, K., Koh, E.S., and Tai, C.N., Surf. Coating Technol. 43/44, 312 (1990).CrossRefGoogle Scholar
5.Tai, C.N. and Koh, E. S., Surf. Coating Technol. 43/44, 324 (1990).CrossRefGoogle Scholar
6.Boxman, R. L. and Goldsmith, S., Surf. Coating Technol. 52, 39–50 (1992).CrossRefGoogle Scholar
7.Ljungcrantz, H., Hultman, L., Soundgren, J.E., Hakansson, G., and Karlsson, L., Surf. Coating Technol. 63, 123–128 (1994).CrossRefGoogle Scholar
8.Poirier, D.M. and Lindfors, P.A., J. Vac. Sci. Technol. A 9 (2), 278–280 (1991).CrossRefGoogle Scholar
9.Kattamis, T. Z., Surf. Coating Technol. 43/44, 390 (1990).CrossRefGoogle Scholar
10.Chang, F.C., Levey, M., Huie, R., Kane, M., Buckley, P., Kattamis, T.Z., and Lakshminarayan, G. R., Surf. Coating Technol. 49, 87 (1991).CrossRefGoogle Scholar
11.Utsumi, T. and English, J. H., J. Appl. Phys. 46 (1), 126 (1975).CrossRefGoogle Scholar
12.Hatto, P.W., Vacuum 36 (1–3), 67 (1986).CrossRefGoogle Scholar
13.Goldsmith, S. and Boxman, R. L., J. Appl. Phys. 51 (7), 3649 (1980).CrossRefGoogle Scholar
14.Hodnett, P. F., J. Appl. Phys. 40 (4), 1753 (1969).CrossRefGoogle Scholar
15.Dao-an, Da, Manual of Vacuum Design (in Chinese) (National Defence Press, Beijing, 1991), p. 560.Google Scholar
16.Wang, L. H. and Huang, Y. T., Thin Film Techni. (in Chinese) (Tsinghua University Press, Beijing, 1991), p. 7.Google Scholar
17.Yan, Y. X., Thin Film Techni. (in Chinese) (Weaponery Industry Press, Beijing, 1994), p. 26.Google Scholar
18.Boxman, B. L. and Goldsmith, S., Surf. Coating Technol. 52, 39 (1992).CrossRefGoogle Scholar