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Oxide nanodot arrays templated from polymer nano-channels via a novel vapor-transport-assisted wet chemistry process

Published online by Cambridge University Press:  31 January 2011

Yi-Feng Lin ,
Wen-Hsien Tseng ,
Hong-Zhi Luan ,
Liang-Yu Chen ,
Shih-Yuan Lu  and
Rong-Ming Ho
Yi-Feng Lin
Affiliation:
Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30013, Republic of China
Wen-Hsien Tseng
Affiliation:
Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30013, Republic of China
Hong-Zhi Luan
Affiliation:
Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30013, Republic of China
Liang-Yu Chen
Affiliation:
Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30013, Republic of China
Shih-Yuan Lu*
Affiliation:
Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30013, Republic of China
Rong-Ming Ho
Affiliation:
Department of Chemical Engineering, National Tsing-Hua University, Hsin-Chu, Taiwan 30043, Republic of China; and Material and Chemical Research Laboratories, ITRI, Hsin-Chu, Taiwan 30013, Republic of China
*
Address all correspondence to these authors: a)e-mail: [email protected]
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Abstract

A novel vapor-transport-assisted wet chemistry process was developed to fabricate oxide nanodot arrays from soft polymer templates. The feasibility and wide applicability of the proposed process was demonstrated with creation of high-density oxide nanodot arrays of TiO2, ZnO, and Co3O4. The present process not only avoids the over-growth problem inevitable in wet chemistry processes but also enables formation of oxide nanodots at low temperatures. The process can be readily extended to other compound systems in which the products can be formed through reactions of two reactants, one in liquid phase and the other in vapor phase.

Keywords

Chemical vapor deposition (CVD) (deposition)NanostructurePolymer
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 8 , August 2008 , pp. 2061 - 2066
Copyright
Copyright © Materials Research Society 2008

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