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Nanoindentation cracking in gallium arsenide: Part I. In situ SEM nanoindentation

Published online by Cambridge University Press:  22 October 2013

Kilian Wasmer ,
Cédric Pouvreau ,
Jean-Marc Breguet ,
Johann Michler ,
Daniel Schulz  and
Jacques Henri Giovanola
Kilian Wasmer*
Affiliation:
Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Advanced Materials Processing, 3602 Thun, Switzerland
Cédric Pouvreau
Affiliation:
Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, 3602 Thun, Switzerland; and Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland
Jean-Marc Breguet
Affiliation:
EPFL, Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland
Johann Michler
Affiliation:
Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, 3602 Thun, Switzerland
Daniel Schulz
Affiliation:
Department Advanced Technologies, Bookham AG, CH-8045 Zürich, Switzerland
Jacques Henri Giovanola
Affiliation:
Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

The nanoindentation fracture behavior of gallium arsenide (GaAs) is examined from two perspectives in two parent papers. The first paper (part I) focuses on in situ nanoindentation within a scanning electron microscope (SEM) and on fractographic observations of cleaved cross-sections of indented regions to investigate the crack field under various indenter geometries. In the second parent paper (part II), cathodoluminescence and transmission electron microscopy are used to investigate the relationship between dislocation and crack fields. The combination of instrumented in situ scanning electron microscopy nanoindentations and cleavage cross-sectioning allows us to establish a detailed map of cracking in the indented region and cracking kinetics for conical and wedge indenter shapes. For wedge nanoindentations, the evolution of the half-penny crack size with the indentation load is interpreted using a simple linear elastic fracture model based on weight functions. Fracture toughness estimates obtained by this technique fall within the range of usual values quoted for GaAs.

Keywords

nanoindentationscanning electron microscopy (SEM)fracture
Type
Articles
Information
Journal of Materials Research , Volume 28 , Issue 20 , 28 October 2013 , pp. 2785 - 2798
Copyright
Copyright © Materials Research Society 2013 

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References

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