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Mixing entropy and the nucleation of silicides: Ni–Pd–Si and Co–Mn–Si ternary systems

Published online by Cambridge University Press:  31 January 2011

C. Detavernier ,
X. P. Qu ,
R. L. Van Meirhaeghe ,
B. Z. Li  and
K. Maex
C. Detavernier*
Affiliation:
Department of Solid-state Physics, Ghent University, Krijgslaan 281/S1, B-9000 Gent, Belgium
X. P. Qu
Affiliation:
Department of Electronic Engineering, Fudan University, Shanghai 200433, People's Republic of China
R. L. Van Meirhaeghe
Affiliation:
Department of Solid-state Physics, Ghent University, Krijgslaan 281/S1, B-9000 Gent, Belgium
B. Z. Li
Affiliation:
Department of Electronic Engineering, Fudan University, Shanghai 200433, People's Republic of China
K. Maex
Affiliation:
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
*
a)Address all correspondence to this author. Present address: I.B.M. T.J. Watson Research Center, Yorktown Heights, NY. 10598 e-mail: [email protected]
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Abstract

Nucleation can play an important role during the formation of silicides, especially when the difference in Gibbs free energy ΔG between the existing and newly formed phase is small. In this work, it is shown that the addition of elements that form a solid solution with either the existing or nucleating phase influences the entropy of mixing and thus changes ΔG. In this way, the height of the nucleation barrier may be controlled, thus controlling the nucleation temperature. The influence of mixing entropy on silicide nucleation is illustrated by experiments for two ternary systems: Co–Mn–Si and Ni–Pd–Si. It is shown that the nucleation temperature of CoSi2 is increased by the addition of Mn, the nucleation temperature of MnSi1.7 is increased by the presence of Co, the nucleation temperature of NiSi2 is increased by the addition of Pd, and the nucleation temperature of PdSi is decreased by the addition of Ni. In all four cases, the effect of the alloying element on the nucleation temperature can be explained by a model on the basis of the concept of mixing entropy.

Type
Articles
Information
Journal of Materials Research , Volume 18 , Issue 7 , July 2003 , pp. 1668 - 1678
Copyright
Copyright © Materials Research Society 2003

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