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Metal-organic chemical vapor deposition of Sr–Co–Fe–O films on porous substrates

Published online by Cambridge University Press:  31 January 2011

Changfeng Xia ,
Timothy L. Ward ,
Paolina Atanasova  and
Robert W. Schwartz
Changfeng Xia
Affiliation:
Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131
Timothy L. Ward
Affiliation:
Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131
Paolina Atanasova
Affiliation:
Department of Chemical and Nuclear Engineering, University of New Mexico, Albuquerque, New Mexico 87131
Robert W. Schwartz
Affiliation:
Sandia National Laboratories, Advanced Materials Laboratory, 1001 University Boulevard SE, Albuquerque, New Mexico 87106
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Extract

Aerosol-assisted chemical vapor deposition using the β-diketonate precursors Sr(tmhd)2 · 2H2O, Fe(tmhd) 3, and Co(tmhd) 3 was investigated for depositing thin films of the mixed-conducting ceramic SrCoyFe1−yO3−δ onto porous α–Al2O3 substrates. Single-phase SrCoyFe1−yO3−δ perovskite films were obtained at a deposition temperature of 550 °C and pressure of 15 mm Hg, whereas deposition at atmospheric pressure produced mixed-phase films. The Co/Fe elemental ratios in the films reflected those in the precursor solution, but the films were depleted in Sr. Reduced-pressure deposition provided a more uniform film morphology than atmospheric pressure, and led to a supported film which was leak-tight to N2 flow.

Type
Articles
Information
Journal of Materials Research , Volume 13 , Issue 1 , January 1998 , pp. 173 - 179
Copyright
Copyright © Materials Research Society 1998

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