Hostname: page-component-5cf477f64f-qls9x Total loading time: 0 Render date: 2025-04-06T09:46:02.575Z Has data issue: false hasContentIssue false
  • English
  • Français

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

Published online by Cambridge University Press:  31 January 2011

T. P. Weihs ,
S. Hong ,
J. C. Bravman  and
W. D. Nix
T. P. Weihs
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
S. Hong
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
J. C. Bravman
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
W. D. Nix
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, California 94305
Get access

Abstract

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.

Type
Articles
Information
Journal of Materials Research , Volume 3 , Issue 5 , October 1988 , pp. 931 - 942
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Doerner, M. F. and Nix, W. D., J. Mater. Res. 1, 601 (1986).CrossRefGoogle Scholar
2Pethica, J., Hutchings, R., and Oliver, W. C., Philos. Mag. A 48, 593 (1983).CrossRefGoogle Scholar
3Finegan, J. D. and Hoffman, R. W., Transactions of the 8th National Vacuum Symposium (Pergamon, New York, 1961), p. 935.Google Scholar
4Sinha, A. K. and Sheng, T. T., Thin Solid Films 48, 117 (1978).CrossRefGoogle Scholar
5Mclnerney, E. J. and Flinn, P. A., in Proceedings of the 20th Annual International Reliability Symposium, IEEE Electron Devices and Reliability Societies (1982), p. 264.CrossRefGoogle Scholar
6Beams, J. W., Freazeale, J. B., and Bart, W. L., Phys. Rev. 100, 1657 (1955).CrossRefGoogle Scholar
7Tsakalakos, T. and Hilliard, J. E., J. Appl. Phys. 54, 734 (1983).CrossRefGoogle Scholar
8Hoffman, R. W., Andeen, C. G., and Hagerling, C. W., Proc. 7th Int. Vacuum Congr., Vienna 2, 1769 (1977).Google Scholar
9Peterson, K. E. and Guarnieri, C. R., J. Appl. Phys. 50, 6761 (1979).CrossRefGoogle Scholar
10Timoshenko, S. P. and Gere, J. M., Mechanics of Materials (Van Nostrand, New York, 1972), p. 179.Google Scholar
11Jaccodine, R. J. and Schlegel, W. A., J. Appl. Phys. 37, 2429 (1966).CrossRefGoogle Scholar
12Neugebauer, C. A., J. Appl. Phys. 31, 1096 (1960).CrossRefGoogle Scholar
13Kinibara, A., Baba, S., and Matuda, N., Thin Solid Films 141, 229 (1986).CrossRefGoogle Scholar
14CRC of Chemistry and Physics, edited by Weast, R. C. (CRC, Boca Raton, FL, 1985), p. F–56.Google Scholar
15Kosterand, W.Franz, H., Metall. Rev. 6(21), 1 (1961).CrossRefGoogle Scholar
16Huntington, H. B., The Elastic Constants of Crystals (Academic, New York, 1985), p. 112.Google Scholar
17Bhattacharya, A. and Nix, W. D., Int. J. Solids Struct, (submitted for publication).Google Scholar
18Metals Handbook, Properties and Selection of Metals (ASM, Metals Park, OH, 1980), 9th ed., Vol. 2, p. 738.Google Scholar
19Nakada, Y., Kocks, U. F., and Chalmers, B., Trans. AIME 230, 607 (1964).Google Scholar
20Timoshenko, S. P. and Woinowsky-Krieger, K., Theory of Plates and Shells (McGraw-Hill, New York, 1940), p. 167.Google Scholar