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Low-temperature growth and characterization of epitaxial ZnO nanorods by metalorganic chemical vapor deposition

Published online by Cambridge University Press:  31 January 2011

Dong Chan Kim ,
Bo Hyun Kong ,
Sung-Yun Jeon ,
Ji-Beom Yoo ,
Hyung Koun Cho ,
Dong Jun Park  and
Jeong Yong Lee
Dong Chan Kim
Affiliation:
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Jangan-gu, Suwon, Gyeonggi-do 440-746, Korea
Bo Hyun Kong
Affiliation:
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Jangan-gu, Suwon, Gyeonggi-do 440-746, Korea
Sung-Yun Jeon
Affiliation:
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Jangan-gu, Suwon, Gyeonggi-do 440-746, Korea
Ji-Beom Yoo
Affiliation:
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Jangan-gu, Suwon, Gyeonggi-do 440-746, Korea
Hyung Koun Cho*
Affiliation:
School of Advanced Materials Science and Engineering, Sungkyunkwan University, Jangan-gu, Suwon, Gyeonggi-do 440-746, Korea
Dong Jun Park
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Yusong-gu, Daejon 305-701, Korea
Jeong Yong Lee
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Yusong-gu, Daejon 305-701, Korea
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

By injecting additional argon gas, we were able to grow one-dimensional ZnO nanorod arrays with a uniform distribution on a large scale at a low temperature of less than 330 °C by metalorganic chemical vapor deposition. All of the nanorods grown on the sapphire substrate had a 30° in-plane rotation with respect to the substrate and showed the epitaxial characteristics of [10¯10]ZnO//[11¯20]sapphire, despite the low-temperature growth. These ZnO nanorods with high crystalline quality exhibited a high enhancement factor and low turn-on field value, thus having good potential to be used as a field emitter.

Keywords

Field emissionMetalorganic depositionNanostructure
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 7 , July 2007 , pp. 2032 - 2036
Copyright
Copyright © Materials Research Society 2007

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References

REFERENCES

1Cui, Y., Wei, Q.Q., Park, H.K. Lieber, C.M.: Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species. Science 293, 1289 2001CrossRefGoogle ScholarPubMed
2Wang, J., Gudiksen, M.S., Duan, X., Cui, Y. Lieber, C.M.: Highly polarized photoluminescence and photodetection from single indium phosphide nanowires. Science 293, 1455 2001CrossRefGoogle ScholarPubMed
3Huang, M.H., Mao, S., Feick, H., Yan, H.Q., Wu, Y.Y., Kind, H., Weber, E., Russo, R. Yang, P.D.: Room-temperature ultraviolet nanowire nanolasers. Science 292, 1897 2001CrossRefGoogle ScholarPubMed
4Ng, H.T., Chen, B., Li, J., Han, J. Meyyappan, M.: Optical properties of single-crystalline ZnO nanowires on m-sapphire. Appl. Phys. Lett. 82, 2023 2003CrossRefGoogle Scholar
5Zhang, B.P., Binh, N.T., Segawa, Y., Wakatsuki, K. Usami, N.: Optical properties of ZnO rods formed by metalorganic chemical vapor deposition. Appl. Phys. Lett. 83, 1635 2003CrossRefGoogle Scholar
6Kim, S.W., Kotani, T., Ueda, M., Fujita, S. Fujita, S.: Selective formation of ZnO nanodots on nanopatterned substrates by metalorganic chemical vapor deposition. Appl. Phys. Lett. 83, 3593 2003CrossRefGoogle Scholar
7Ku, C.H., Chiang, H.H. Wu, J.J.: Bandgap engineering of well-aligned Zn1−xMgxO nanorods grown by metalorganic chemical vapor deposition. Chem. Phys. Lett. 404, 132 2005CrossRefGoogle Scholar
8Lee, D.J., Park, J.Y., Yun, Y.S., Hong, Y.S., Moon, J.H., Lee, B.T. Kim, S.S.: Comparative studies on the growth behavior of ZnO nanorods by metalorganic chemical vapor deposition depending on the type of substrates. J. Cryst. Growth 276, 458 2005CrossRefGoogle Scholar
9Jeong, M.C., Oh, B.Y., Nam, O.H., Kim, T. Myoung, J.M.: Three-dimensional ZnO hybrid nanostructures for oxygen sensing application. Nanotechnology 17, 526 2006CrossRefGoogle Scholar
10Zhao, Q., Zhang, H.Z., Zhu, Y.W., Feng, S.Q., Sun, X.C., Xu, J. Xu, D.P.: Morphological effects on the field emission of ZnO nanorod arrays. Appl. Phys. Lett. 86, 203115 2005CrossRefGoogle Scholar
11Zhao, Q., Xu, X.Y., Song, X.F., Zhang, X.Z., Yu, D.P., Li, C.P. Guo, L.: Enhanced field emission from ZnO nanorods via thermal annealing in oxygen. Appl. Phys. Lett. 88, 033102 2006CrossRefGoogle Scholar
12Yi, G.C., Wang, C. Park, W.I.: ZnO nanorods: Synthesis, characterization and applications. Semicond. Sci. Technol. 20, S22 2005CrossRefGoogle Scholar
13Cui, J.B., Daghlian, C.P., Gibson, U.J., Püsche, R., Geithner, P. Ley, L.: Low-temperature growth and field emission of ZnO nanowire arrays. J. Appl. Phys. 97, 044315 2005CrossRefGoogle Scholar
14Hung, C.H. Whang, W.T.: Low-temperature solution approach toward highly aligned ZnO nanotip arrays. J. Cryst. Growth 268, 242 2004CrossRefGoogle Scholar
15Yang, H.Y., Lau, S.P., Yu, S.F., Huang, L., Tanemura, M., Tanaka, J., Okita, T. Hng, H.H.: Field emission from zinc oxide nanoneedles on plastic substrates. Nanotechnology 16, 1300 2005CrossRefGoogle Scholar
16Rakhshani, A.E.: Thin ZnO films prepared by chemical solution deposition on glass and flexible conducting substrate. Appl. Phys. A 81, 1497 2005CrossRefGoogle Scholar
17Banerjee, A.N., Ghosh, C.K., Chattopadhyay, K.K., Minoura, H., Sarkar, A.K., Akiba, A., Kamiya, A. Endo, T.: Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering technique. Thin Solid Films 496, 112 2006CrossRefGoogle Scholar
18Triboulet, R. Perrière, J.: Epitaxial growth of ZnO films. Prog. Cryst. Growth Charact. Mater. 47, 65 2003CrossRefGoogle Scholar
19Kim, D.C., Kong, B.H., Park, D.J., Lee, J.Y. Cho, H.K.: Effects of buffer layer thickness on growth and properties of ZnO nanorods grown by metalorganic chemical vapour deposition. Nanotechnology 18, 015603 2007CrossRefGoogle Scholar
20Zhang, Y., Du, G., Liu, B., Zhu, H.C., Yang, T., Li, W., Liu, D. Yang, S.: Effects of ZnO buffer layer thickness on properties of ZnO thin films deposited by low-pressure MOCVD. J. Cryst. Growth 262, 456 2004CrossRefGoogle Scholar
21Ye, J., Gu, S., Zhu, S., Liu, S., Liu, W., Zhou, X., Hu, L., Zhang, R., Shi, Y. Zheng, Y.: Comparative study of diethylzinc and dimethylzinc for the growth of ZnO. J. Cryst. Growth 274, 489 2005CrossRefGoogle Scholar
22Fowler, R.H. Nordheim, L.W.: Electron emission in intense electric fields. Proc. R. Soc. London, Ser. A 119, 173 1928Google Scholar
23Araki, H., Katayama, T. Yoshino, K.: Field emission from aligned carbon nanotubes prepared by thermal chemical vapor deposition of Fe-phthalocyanine. Appl. Phys. Lett. 79, 2636 2001CrossRefGoogle Scholar