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Laser photosublimation of compound semiconductors

Published online by Cambridge University Press:  31 January 2011

M. Rothschild ,
C. Arnone  and
D. J. Ehrlich
M. Rothschild
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
C. Arnone
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
D. J. Ehrlich
Affiliation:
Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, Massachusetts 02173
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Abstract

The visible-laser sublimation of CdTe, HgCdTe, CdS, and GaAs has been studied. A dynamic light guiding has been identified with an active feedback mechanism and is connected to the observation of 0.4 μm wide single-mode guiding structures during deep etching. The incipient stages of sublimation have been studied by mass spectrometry and are discussed in relation to diffusion mechanisms in the solid state.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 2 , April 1987 , pp. 244 - 251
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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