Hostname: page-component-78c5997874-ndw9j Total loading time: 0 Render date: 2024-11-08T05:16:35.874Z Has data issue: false hasContentIssue false
  • English
  • Français

Infrared optical properties of CVD diamond films

Published online by Cambridge University Press:  31 January 2011

X. H. Wang ,
L. Pilione ,
W. Zhu ,
W. Yarbrough ,
W. Drawl  and
R. Messier
X. H. Wang
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
L. Pilione
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
W. Zhu
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
W. Yarbrough
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
W. Drawl
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
R. Messier
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, Pennsylvania 16802
Get access

Abstract

Diamond films of 15–20 μm thicknesses were prepared by microwave plasma enhanced chemical vapor deposition onto crystalline silicon substrates. The growth surfaces of the films were rough with polycrystalline crystallographic habits, while the substrate sides of these films were smooth and featureless as viewed by optical microscopy. A heated cast iron scaife was used to polish the rough growth surfaces, and free-standing films were removed from the silicon substrates by dissolving the silicon in an aqueous HF. Both infrared optical transmission and reflection spectra were measured over the range of 600–4000 cm−1. For polished films, near 70% transmittance was obtained over the whole range, while the transmittance for nonpolished films was much lower and varied strongly with the wave number. Absorptions due to carbon-hydrogen stretching bands as well as a silicon carbide phase were observed in the transmission spectra. The optical absorption coefficient and the refractive index were found to vary from as high as 150 to as low as 7 cm−1 and 2.41 to 2.49, respectively (depending on the film quality and the wave number). A weak signature of the two-phonon absorption band of diamond was observed. The relationship between deposition conditions and infrared optical properties of diamond films before as well as after polishing is discussed.

Type
Diamond and Diamond-Like Materials
Information
Journal of Materials Research , Volume 5 , Issue 11 , November 1990 , pp. 2345 - 2350
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1DeVries, R.C., Ann. Rev. Mat. Sci. 17, 161 (1987).CrossRefGoogle Scholar
2Badzian, A. R. and DeVries, R. C., Mater. Res. Bull. XXIII, 385 (1988).CrossRefGoogle Scholar
3Angus, J. C. and Hayman, C., Science 241, 913 (1988).CrossRefGoogle Scholar
4Spear, K., J. Am. Ceram. Soc. 72, 171 (1989).CrossRefGoogle Scholar
5Yarbrough, W.A., Rosen, N.D., Pilione, L.R., and Drawl, W.D., Proc. SPIE 1112, 176 (1989).CrossRefGoogle Scholar
6Cody, G.D., Abeles, B., Wronski, C.R., and Brooks, B., J. Non-Cryst. Solids 35, 463 (1980).CrossRefGoogle Scholar
7Wild, Ch., Herres, N., Wagner, J., Koidl, P., and Anthony, T. R., in Proc. 1st Int. Symp. on Diamond and Diamond-Like Films, edited by Dismukes, J. P., Purdes, A. J., Spear, K. E., Meyerson, B. S., Ravi, K.V., Moustakas, T. D., and Yoder, M. (The Electrochemical Society Inc., Pennington, NJ, 1989), Vol. 89–12, p. 283.Google Scholar
8Gatesman, A.J., Giles, R.H., Phillips, G.C., Waldman, J., Bourget, L.P., and Post, R., in Diamond, Boron Nitride, Silicon Carbide and Related Wide Bandgap Semiconductors, edited by Glass, J.T., Messier, R. F., and Fujimori, N. (Mater. Res. Soc. Symp. Proc. 162, Pittsburgh, PA, 1990).Google Scholar
9Badzian, A. R., Badzian, T., Roy, R., Messier, R., and Spear, K. E., Mater. Res. Bull. XXIII, 531 (1988).CrossRefGoogle Scholar
10Bruton, E., Diamonds (N.A.G. Press Ltd., London, 1978), p. 235.Google Scholar
11Wang, X. H., Pilione, L., Zhu, W., Yarbrough, W., Drawl, W., and Messier, R., Proc. SPIE (1990) (in press).Google Scholar
12Pickrell, D., Zhu, W., Badzian, A. R., Messier, R., and Newnham, R.E., J. Mater. Res. (1990) (in press).Google Scholar
13Zhu, W., Messier, R., and Badzian, A. R., in Proc. 1st Int. Symp. on Diamond and Diamond-Like Films, edited by Dismukes, J. P., Purdes, A. J., Spear, K. E., Meyerson, B. S., Ravi, K.V., Moustakas, T. D., and Yoder, M. (The Electrochemical Society Inc., Pennington, NJ, 1989), Vol. 89–12, p. 61.Google Scholar
14Badzian, A. R., Simonton, B., Badzian, T., Messier, R., Spear, K. E., and Roy, R., Proc. SPIE 683, 127 (1986).CrossRefGoogle Scholar
15Azzam, R.M. A. and Bashara, N.M., Ellipsometry and Polarized Light (North Holland, Amsterdam, 1979), p. 283.Google Scholar
16Davies, G., in Chemistry and Physics of Carbon, edited by Walker, P. L. Jr, and Thrower, P.A. (Marcel Dekker Inc., New York, 1977), p. 7.Google Scholar