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Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp3-bonded BN films

Published online by Cambridge University Press:  04 February 2014

Shojiro Komatsu  and
Masaharu Shiratani
Shojiro Komatsu*
Affiliation:
Plasma Application Group, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Masaharu Shiratani
Affiliation:
Kyushu University, Motooka, Fukuoka 819-0395, Japan
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Scanning electron microscopic (SEM) observations revealed that individual and independent microcones of sp3-bonded boron nitride grown by laser-activated plasma chemical vapor deposition were accompanied by ripple patterns spreading around them in the dimension of micrometers or sub-micrometers. The ripples were expanding equidistantly from each other and diminishing as they depart from a cone. The origin of the ripples was attributed to the interference of a direct laser cast on the plane surface and that reflected from the side of a cone; this model was satisfactorily in agreement with the SEM measurement, in which the side surface of a cone was mapped onto the plane surface surrounding the cone in the mathematical meaning of “bijection.” This micro-optical effect due to the wave nature of laser was considered to indicate and support the photochemically activated growth reactions in this process.

Type
Articles
Information
Journal of Materials Research , Volume 29 , Issue 4 , 28 February 2014 , pp. 485 - 491
Copyright
Copyright © Materials Research Society 2014 

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References

REFERENCES

Komatsu, S.: New type of BN nanoparticles and films prepared by synergetic deposition processes using laser and plasma: The nanostructures, properties and growth mechanisms. J. Phys. D: Appl. Phys. 40, 2320 (2007).Google Scholar
Komatsu, S., Ohta, E., Tanaka, H., Moriyoshi, Y., Nakajima, K., Chikyo, T., and Shiratani, M.: Electron field emission in air at an atmospheric pressure from sp3-bonded 5H-BN microcones. J. Appl. Phys. 101, 084904 (2007).Google Scholar
Komatsu, S., Kazami, D., Tanaka, H., Moriyoshi, Y., Shiratani, M., and Okada, K.: Fractal growth of sp3-bonded 5H-BN microcones by plasma-assisted laser chemical vapor deposition. J. Appl. Phys. 99, 123512 (2006).Google Scholar
Komatsu, S., Kazami, D., Tanaka, H., Moriyoshi, Y., Shiratani, M., and Okada, K.: Fractal growth mechanism of sp3-bonded 5H-BN microcones by plasma-assisted pulsed-laser chemical vapor deposition. J. Chem. Phys. 125, 084701 (2006).Google Scholar
Komatsu, S., Sato, Y., Hirano, D., Nakamura, T., Koga, K., Yamamoto, A., Nagata, T., Chikyo, T., Watanabe, T., Takizawa, T., Nakamura, K., Hashimoto, T., and Shiratani, M.: P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser–plasma synchronous CVD method. J. Phys. D: Appl. Phys. 42, 225107 (2009).Google Scholar
Komatsu, S., Okudo, A., Kazami, D., Golberg, D., Li, Y., Moriyoshi, Y., Shiratani, M., and Okada, K.: Electron field emission from self-organized micro-emitters of sp3-bonded 5H Boron nitride with very high current density at low electric field. J. Phys. Chem. B 108, 5182 (2004).Google Scholar
Fursey, G.: Field Emission in Vacuum Microelectronics (Kluwer Academic/Plenum Publishing, New York, 2005), p. 6, 12.Google Scholar
Komatsu, S., Kobayashi, K., Sato, Y., Hirano, D., Nakamura, T., Nagata, T., Chikyo, T., Watanabe, T., Takizawa, T., Nakamura, K., and Hashimoto, T.: Photoinduced phase transformations in boron nitride: New polytypic forms of sp3-bonded (6H- and 30H-) BN. J. Phys. Chem. C 114, 13176 (2010).Google Scholar
Komatsu, S. and Moriyoshi, Y.: Transition of the apparent activation energy for the growth of boron films as a function of substrate temperature in plasma-enhanced chemical vapour deposition from B2H6 + He. J. Phys. D 23, 1244 (1990).Google Scholar
Walgraef, D.: Spatio-Temporal Pattern Formation (Springer, New York, 1997), p. 37, 64.Google Scholar
Fox, M.: Optical Properties of Solids (Oxford University Press, Oxford, England, 2001), p. 2, 5.Google Scholar