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Fabrication of carbon-nanotube-based sensor array and interference study

Published online by Cambridge University Press:  23 August 2011

Yijang Lu ,
M. Meyyappan  and
Jing Li
Yijang Lu
Affiliation:
NASA Ames Research Center Moffett Field, California 94035
M. Meyyappan
Affiliation:
NASA Ames Research Center Moffett Field, California 94035
Jing Li*
Affiliation:
NASA Ames Research Center Moffett Field, California 94035
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

An array of 32 sensor elements with single-walled carbon nanotubes (SWCNTs) as the sensing medium has been fabricated. The microfabrication approach used allows reduction of the chip size and increases the number of sensor elements in a chip and is amenable for large wafer scale-up. The sensor array chip is designed as an electronic nose for use with the aid of a pattern recognition algorithm. The sensor chips were tested for NO2 sensing and interfering effects from humidity and a background of chlorine. The results indicate that NO2 can be detected at low concentration levels of 0.5 ppm in the presence of chlorine at 30 times higher concentrations. The sensor response is affected by humidity, which implies that the training data set for NO2 detection needs to be generated for multiple humidity levels for interpolation purposes during field use.

Keywords

SensorNanostructure
Type
Invited Feature Paper
Information
Journal of Materials Research , Volume 26 , Issue 16 , 28 August 2011 , pp. 2017 - 2023
Copyright
Copyright © Materials Research Society 2011

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