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Enhanced hardness of CrAlSiN/W2N superlattice coatings deposited by direct current magnetron sputtering

Published online by Cambridge University Press:  31 January 2011

Y.Z. Tsai  and
J.G. Duh
Y.Z. Tsai
Affiliation:
Department of Material Science and Engineering, National Tsing-Hua University, Hsinchu 300, Taiwan
J.G. Duh*
Affiliation:
Department of Material Science and Engineering, National Tsing-Hua University, Hsinchu 300, Taiwan
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

CrAlSiN/W2N nanolayered coatings were prepared by direct current magnetron sputtering. The modulation periods of multilayer coatings were controlled in the range from 3 to 20 nm. From the low angle x-ray diffraction and high angle x-ray diffraction (XRD) satellite peaks, the superlattice structure of these coatings was evidenced. The modulation periods of multilayer coatings were obtained precisely by the low angle XRD and high angle XRD satellite peaks methods. The detailed layered structure was further investigated by high-resolution transmission electron microscopy. Because of the dense and smooth nanolayered microstructure, the CrAlSiN/W2N multilayer films exhibited excellent microhardness. With an appropriate modulation period of 8 nm, the hardness reached a maximum around 40 GPa. The hardness enhancement is attributed to the large lattice mismatch and strengthening of superlattice structure, which is confirmed by XRD and transmission electron microscopy.

Keywords

HardnessStructuralSputtering
Type
Articles
Information
Journal of Materials Research , Volume 25 , Issue 12 , December 2010 , pp. 2325 - 2329
Copyright
Copyright © Materials Research Society 2010

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References

REFERENCES

1.Polychronopoulou, K., Baker, M.A., Rebholz, C., Neidhardt, J., O'Sullivan, M., Reiter, A.E., Kanakis, K., Leyland, A., Matthews, A., Mitterer, C.: The nanostructure, wear and corrosion performance of arc-evaporated CrBxNy nanocomposite coatings. Surf. Coat. Technol. 204, 246 (2009)Google Scholar
2.Mo, J.L., Zhu, M.H.: Tribological characterization of chromium nitride coating deposited by filtered cathodic vacuum arc. Appl. Surf. Sci. 255, 7627 (2009)CrossRefGoogle Scholar
3.Wu, F.B., Lee, J.J., Duh, J.G.: Evaluation of the mechanical properties and tribological behavior of the CrN coating deposited on mild steel modified with electroless Ni interlayer. Thin Solid Films 377, 354 (2000)Google Scholar
4.Mayrhofer, P.H., Tischler, G., Mitterer, C.: Microstructure and mechanical/thermal properties of Cr–N coatings deposited by reactive unbalanced magnetron sputtering. Surf. Coat. Technol. 142, 78 (2001)Google Scholar
5.Kawate, M., Hashimoto, A.K., Suzuki, T.: Oxidation resistance of Cr1–xAlxN and Ti1–xAlxN films. Surf. Coat. Technol. 165, 163 (2003)Google Scholar
6.Wu, F.B., Tien, S.K., Lee, J.W., Duh, J.G.: Comparison in microstructure and mechanical properties of nanocomposite CrWN and nanolayered CrN/WN coatings. Surf. Coat. Technol. 200, (10)3194 (2006)Google Scholar
7.Purushotham, K.P., Ward, L.P., Brack, N., Pigram, P.J., Evans, P., Noorman, H., Manory, R.R.: Wear behavior of CrN coatings MEVVA ion implanted with Zr. Wear 257, 901 (2004)CrossRefGoogle Scholar
8.Ducros, C., Benevent, V., Sanchette, F.: Deposition, characterization and machining performance of multilayer PVD coatings on cemented carbide cutting tools. Surf. Coat. Technol. 163, 681 (2003)CrossRefGoogle Scholar
9.Wong, M.S., Hsiao, G.Y., Yang, S.Y.: Preparation and characterization of AlN/ZrN and AlN/TiN nanolaminate coatings. Surf. Coat. Technol. 133, 160 (2000)CrossRefGoogle Scholar
10.Tsai, Y.Z., Duh, J.G.: Thermal stability and microstructure characterization of CrN/WN multilayer coatings fabricated by ion-beam-assisted deposition. Surf. Coat. Technol. 200, 1683 (2005)CrossRefGoogle Scholar
11.Tsai, Y.Z., Duh, J.G.: Tribological behavior of CrN/WN multilayer coatings grown by ion-beam-assisted deposition. Surf. Coat. Technol. 201, 4266 (2006)CrossRefGoogle Scholar
12.Lim, J-W., Lee, S.H., Lee, J-J.: Preparation and properties of nanoscale multilayered TiN/AlN coatings deposited by plasma enhanced chemical vapor deposition. Surf. Coat. Technol. 169, 460 (2003)Google Scholar
13.Kim, G.S., Lee, S.Y., Hahn, J.H., Lee, S.Y.: Synthesis of CrN/AlN superlattice coatings using closed-field unbalanced magnetron sputtering process. Surf. Coat. Technol. 171, 91 (2003)CrossRefGoogle Scholar
14.Kim, S.H., Baik, Y.J., Kwon, D.: Analysis of interfacial strengthening from composite hardness of TiN/VN and TiN/NbN multilayer hard coatings. Surf. Coat. Technol. 187, 47 (2004)CrossRefGoogle Scholar
15.Bemporad, E., Pecchio, C., De Rossi, S., Carassiti, F.: Characterization and wear properties of industrially produced nanoscaled CrN/NbN multilayer coating. Surf. Coat. Technol. 188, 319 (2004)CrossRefGoogle Scholar
16.Chu, X., Barnett, S.A.: Model of superlattice yield stress and hardness enchancements. J. Appl. Phys. 77, 4403 (1995)CrossRefGoogle Scholar
17.Tien, S.K., Lin, C.H., Tsai, Y.Z., Duh, J.G.: Effect of nitrogen flow on the properties of quaternary CrAlSiN coatings at elevated temperatures. Surf. Coat. Technol. 202, 735 (2007)Google Scholar
18.Oliver, W.C., Pharr, G.M.: An improved technique for determining hardness and elastic-modulus using load and displacement sensing indentation experiments. J. Mater. Res. 7, 1564 (1992)CrossRefGoogle Scholar
19.Li, G.Y., Han, Z.H., Tian, J.W., Xu, J.H., Gu, M.Y.: Alternating stress field and superhardness effect in TiN/NbN superlattice films. J. Vac. Sci. Technol., A 20, 674 (2002)Google Scholar
20.Fullerton, E.E., Schuller, I.K., Vanderstraeten, H., Bruynseraede, Y.: Structural refinement of superlattices from x-ray-diffraction. Phys. Rev. B 45, 9292 (1992)Google Scholar
21.Yashar, P.C., Sproul, W.D.: Nanometer scale multilayered hard coatings. Vacuum 55, 179 (1999)Google Scholar
22.Abadias, G., Tse, Y.Y., Michael, A., Jaouen, C., Jaouen, M.: Nanoscaled composite TiN/Cu multilayer thin films deposited by dual ion beam sputtering: Growth and structural characterization. Thin Solid Films 433, 166 (2003)Google Scholar
23.Barshilia, H.C., Jain, A., Rajam, K.S.: Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings. Vacuum 72, 241 (2004)CrossRefGoogle Scholar
24.Shinn, M., Hultman, L., Barnett, S.A.: Growth, structure, and microhardness of epitaxial TiN/NbN superlattices. J. Mater. Res. 7, 901 (1992)Google Scholar