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Effects of substrate crystallinity on the on-state resistance of 6H–SiC photoconductive switches

Published online by Cambridge University Press:  15 August 2012

Wei Huang ,
Shao-Hui Chang ,
Xue-Chao Liu ,
Biao Shi ,
Tian-Yu Zhou ,
Xi Liu ,
Cheng-Fen Yan ,
Yan-Qing Zhen ,
Jian-Hua Yang  and
Er-Wei Shi
Wei Huang
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Shao-Hui Chang
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Xue-Chao Liu*
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Biao Shi
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Tian-Yu Zhou
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Xi Liu
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Cheng-Fen Yan
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Yan-Qing Zhen
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Jian-Hua Yang
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
Er-Wei Shi
Affiliation:
Laboratory of Silicon Carbide, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

In this work, the relationship between the substrate crystallinity and the on-state resistances of silicon carbide (SiC) photoconductive semiconductor switches (PCSSs) was investigated. PCSSs with different channel lengths were fabricated on semi insulating 6H–SiC having different crystal qualities. A method was introduced for determining the photoconductive capacity of the SiC PCSSs. The experimental data suggest that the photoconductive capacity decreases sharply with the degradation of the full width at half maximum of the rocking curve of the 6H–SiC substrates. It is found that increasing the carrier mobility is a key factor for reducing the on-state resistance of the 6H–SiC PCSSs. Moreover, the results in this work present reference for the selection of 6H–SiC substrates for the fabrication of PCSSs and some other photoelectric devices.

Type
Articles
Information
Journal of Materials Research , Volume 28 , Issue 1: Focus Issue: Silicon Carbide – Materials, Processing and Devices , 14 January 2013 , pp. 38 - 43
Copyright
Copyright © Materials Research Society 2012

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References

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