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Direct synthesis of ultra-thin large area transition metal dichalcogenides and their heterostructures on stretchable polymer surfaces

Published online by Cambridge University Press:  03 March 2016

Michael E. McConney ,
Nicholas R. Glavin ,
Abigail T. Juhl ,
Michael H. Check ,
Michael F. Durstock ,
Andrey A. Voevodin ,
Travis E. Shelton ,
John E. Bultman ,
Jianjun Hu  and
Michael L. Jespersen
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Michael E. McConney
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Nicholas R. Glavin
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Abigail T. Juhl
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Michael H. Check
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Michael F. Durstock
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Andrey A. Voevodin
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Travis E. Shelton
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and University of Dayton Research Institute, Dayton, Ohio 45469, USA
John E. Bultman
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and University of Dayton Research Institute, Dayton, Ohio 45469, USA
Jianjun Hu
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and University of Dayton Research Institute, Dayton, Ohio 45469, USA
Michael L. Jespersen
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and University of Dayton Research Institute, Dayton, Ohio 45469, USA
Maneesh K. Gupta
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and University of Dayton Research Institute, Dayton, Ohio 45469, USA
Rachel D. Naguy
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and University of Dayton Research Institute, Dayton, Ohio 45469, USA
Jennifer G. Colborn
Affiliation:
Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA; and Department of Mechanical Engineering, University of Dayton, Dayton, Ohio 45469, USA
Aman Haque
Affiliation:
Mechanical and Nuclear Engineering, Pennsylvania State University, University Park, Pennsylvania 16801, USA
Phillip T. Hagerty
Affiliation:
Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA; Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Randall E. Stevenson
Affiliation:
Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA; Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
Christopher Muratore*
Affiliation:
Department of Chemical and Materials Engineering, University of Dayton, Dayton, Ohio 45469, USA; Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson AFB, Ohio 45433, USA
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

A scalable approach for synthesis of ultra-thin (<10 nm) transition metal dichalcogenides (TMD) films on stretchable polymeric materials is presented. Specifically, magnetron sputtering from pure TMD targets, such as MoS2 and WS2, was used for growth of amorphous precursor films at room temperature on polydimethylsiloxane substrates. Stacks of different TMD films were grown upon each other and integrated with optically transparent insulating layers such as boron nitride. These precursor films were subsequently laser annealed to form high quality, few-layer crystalline TMDs. This combination of sputtering and laser annealing is commercially scalable and lends itself well to patterning. Analysis by Raman spectroscopy, scanning probe, optical, and transmission electron microscopy, and x-ray photoelectron spectroscopy confirm our assertions and illustrate annealing mechanisms. Electrical properties of simple devices built on flexible substrates are correlated to annealing processes. This new approach is a significant step toward commercial-scale stretchable 2D heterostructured nanoelectronic devices.

Keywords

plasma depositionsemiconducting
Type
Article
Information
Journal of Materials Research , Volume 31 , Issue 7: Focus Issue: Two-Dimensional Heterostructure Materials , 14 April 2016 , pp. 967 - 974
Copyright
Copyright © Materials Research Society 2016 

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