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Dependence of the properties of laser deposited tin oxide films on process variables

Published online by Cambridge University Press:  31 January 2011

V. P. Godbole ,
R. D. Vispute ,
S. M. Chaudhari ,
S. M. Kanetkar  and
S. B. Ogale
V. P. Godbole
Affiliation:
Department of Physics, University of Poona, Pune-411 007, India
R. D. Vispute
Affiliation:
Department of Physics, University of Poona, Pune-411 007, India
S. M. Chaudhari
Affiliation:
Department of Physics, University of Poona, Pune-411 007, India
S. M. Kanetkar
Affiliation:
Department of Physics, University of Poona, Pune-411 007, India
S. B. Ogale
Affiliation:
Department of Physics, University of Poona, Pune-411 007, India
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Abstract

In this paper we report the influence of process variables, viz., substrate temperature, oxygen partial pressure, and external electric field bias, on phase precipitation and microstructure of tin oxide films as revealed by small-angle x-ray diffraction and conversion electron Mössbauer spectroscopy.

Type
Articles
Information
Journal of Materials Research , Volume 5 , Issue 2 , February 1990 , pp. 372 - 377
Copyright
Copyright © Materials Research Society 1990

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References

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