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Characterization of ion-beam mixed multilayers via grazing x-ray reflectometry

Published online by Cambridge University Press:  31 January 2011

M. G. Le Boité ,
A. Traverse ,
L. Névot ,
B. Pardo  and
J. Corno
M. G. Le Boité
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, Batiment 108, BP1, 91406 Orsay, France
A. Traverse
Affiliation:
Centre de Spectrométrie Nucléaire et Spectrométrie de Masse, Batiment 108, BP1, 91406 Orsay, France
L. Névot
Affiliation:
Institut d'Optique, Batiment 503, BP43, 91406 Orsay, France
B. Pardo
Affiliation:
Institut d'Optique, Batiment 503, BP43, 91406 Orsay, France
J. Corno
Affiliation:
Institut d'Optique, Batiment 503, BP43, 91406 Orsay, France
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Abstract

The grazing x-ray reflectrometry technique was used as a way to study modifications in metallic multilayers induced by ion-beam irradiation. Due to the high sensitivity of the technique, short-range atomic displacements of an atom A in a layer B can be detected so that the first stages of ion-beam mixing can be investigated. The rate of mixing is measured and the compound A1−xBx formed at the layers' interfaces is characterized.

Type
Articles
Information
Journal of Materials Research , Volume 3 , Issue 6 , December 1988 , pp. 1089 - 1096
Copyright
Copyright © Materials Research Society 1988

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References

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