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Berkovich indentation of diamondlike carbon coatings on silicon substrates

Published online by Cambridge University Press:  31 January 2011

Ayesha J. Haq ,
P.R. Munroe ,
M. Hoffman ,
P.J. Martin  and
A. Bendavid
Ayesha J. Haq*
Affiliation:
School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
P.R. Munroe
Affiliation:
School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
M. Hoffman
Affiliation:
School of Materials Science and Engineering, University of New South Wales, Sydney, NSW 2052, Australia
P.J. Martin
Affiliation:
Commonwealth Scientific and Industrial Research Organization (CSIRO) Materials Science and Engineering, Lindfield, NSW 2070, Australia
A. Bendavid
Affiliation:
Commonwealth Scientific and Industrial Research Organization (CSIRO) Materials Science and Engineering, Lindfield, NSW 2070, Australia
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

The deformation behavior of diamondlike carbon (DLC) coatings on silicon substrates induced by Berkovich indentation has been investigated. DLC coatings deposited by a plasma-assisted chemical vapor deposition technique were subjected to nanoindentation with a Berkovich indenter over a range of maximum loads from 100 to 300 mN. Distinct pop-ins were observed for loads greater than 150 mN. However, no pop-out was observed for the loads studied. The top surface of the indents showed annular cracks with associated fragmented material. The cross sections showed up to 20% localized reduction in thickness of the DLC coating beneath the indenter tip. Cracking, {111} slip, stacking faults, and localized phase transformations were observed in the silicon substrate. The discontinuities in the load–displacement curves at low loads are attributed to plastic deformation of the silicon substrate, whereas at higher loads they are attributed to plastic deformation as well as phase transformation.

Keywords

SiThin filmTransmission electron microscopy (TEM)
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 7 , July 2008 , pp. 1862 - 1869
Copyright
Copyright © Materials Research Society 2008

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