Hostname: page-component-78c5997874-j824f Total loading time: 0 Render date: 2024-11-08T02:54:40.975Z Has data issue: false hasContentIssue false

Structural and optical characterization of BaTiO3 thin films prepared by metal-organic deposition from barium 2-ethylhexanoate and titanium dimethoxy dineodecanoate

Published online by Cambridge University Press:  03 March 2011

W. Ousi-Benomar
Affiliation:
Department of Physics, Center for Optics, Photonics and Lasers (COPL), Laval University, University City, Québec, Canada G1K 7P4
S.S. Xue
Affiliation:
Department of Physics, Center for Optics, Photonics and Lasers (COPL), Laval University, University City, Québec, Canada G1K 7P4
R.A. Lessard
Affiliation:
Department of Physics, Center for Optics, Photonics and Lasers (COPL), Laval University, University City, Québec, Canada G1K 7P4
A. Singh
Affiliation:
National Optical Institute, 369, Rue Franquet, Ste-Foy, Québec, Canada GIP 4N8
Z. L. Wu
Affiliation:
Department of Physics, Wayne State University, Detroit, Michigan 48202
P. K. Kuo
Affiliation:
Department of Physics, Wayne State University, Detroit, Michigan 48202
Get access

Abstract

Single phase BaTi03 thin films were prepared by metal-organic deposition (MOD) using barium 2-ethylhexanoate and titanium dimethoxy dineodecanoate as the metal-organic precursors. A series of experiments was conducted on the metal-organic spin-coated films and their correspondingly annealed samples by employing experimental techniques ranging from thermogravimetric analysis (TGA), Fourier transform infrared spectroscopy (FTIR), x-ray diffraction (XRD), and scanning electron microscopy (SEM), to various optical property characterization methods. A better understanding has been achieved regarding the metal-organic decomposition mechanism, the solid-state BaTi03 film formation and crystallization process, as well as the relationship between the structure and the optical properties of the prepared films. The conclusions of our experiments are as follows: Upon annealing the barium 2-ethylhexanoate spin-coated films, barium carbonate (BaC03) is formed at a relatively low temperature of 300 °C, and at an annealing temperature around 700 °C forms the barium peroxymonocarbonate (BaCO4). Upon annealing the titanium dimethoxy dineodecanoate spin-coated films, anatase is first formed at a low annealing temperature about 400 °C and transforms to rutile phase around an annealing temperature of 800 °C. Upon annealing the spin-coated films from the equimolar mixture of barium 2-ethylhexanoate and titanium dimethoxy dineodecanoate formulations, BaTi03 is formed around an annealing temperature of 600 °C via solid-state reaction between BaCO3 and TiO2 (anatase). The structure of MOD prepared BaTiO3 films has several specific features: instead of the columnar structure in physical vapor deposited (PVD) films, the crystal grains in granular shape are characteristic of MOD films, and the crystallites are much larger near the surface of the film than near the substrates. Optical properties of the prepared BaTi03 films have been reported. Optical characterization shows that the scattering losses contribute dominantly to the total optical losses. The relationship between the structure and the optical properties of the prepared films has also been discussed.

Type
Articles
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Wong, C., Teng, Y-Y., Askok, J., and Varoprasad, P.L.H., in Handbook of Optical Constants of Solids II, edited by Palik, E. D. (Academic Press, Boston, MA, 1991), p. 789.Google Scholar
2Van Buskirk, P. C., Gardiner, R., Kirlin, P. S., and Kiupanidhi, S., J. Vac. Sci. Technol. A 10, 1578 (1992).CrossRefGoogle Scholar
3Tomashpolskli, Y. Y. and Serostyanov, M. A., Sov. Phys. Solid State 14, 2319 (1973).Google Scholar
4Panitz, K. G. and Hu, C-C., J. Vac. Sci. Technol. 16, 315 (1979).CrossRefGoogle Scholar
5McClure, D.J. and Crowe, J.R., J. Vac. Sci. Technol. 16, 311 (1979).CrossRefGoogle Scholar
6Rose, T. L., Kelliher, E. M., Scoville, A. N., and Stone, S. E., J. Appl. Phys. 55, 3706 (1984).CrossRefGoogle Scholar
7Screenivas, K., Mansingh, A., and Sayer, M., J. Appl. Phys. 62, 4475 (1987).CrossRefGoogle Scholar
8Shi, Z. Q., Jia, Q. X., and Anderson, W. A., J. Vac. Sci. Technol. A 10, 733 (1992).CrossRefGoogle Scholar
9Wills, L. A., Wessels, B. W., Richeson, D. S., and Marks, T. J., Appl. Phys. Lett. 60, 41 (1992).CrossRefGoogle Scholar
10Shaikh, A. S. and Vest, G. M., J. Am. Ceram. Soc. 69, 682 (1986).CrossRefGoogle Scholar
11Xu, J. J., Shaikh, A. S., and Vest, R. W., IEEE Trans. UFFC 36, 307 (1989).CrossRefGoogle Scholar
12Manifacier, J. C., Gasiot, J., and Fillard, J. P., J. Phys. 9, 1002 (1976).Google Scholar
13Jackson, W. B., Amer, N. M., Boccara, A. C., and Fournier, D., Appl. Opt. 20, 1333 (1981).CrossRefGoogle Scholar
14Braunstein, G., Paz-Pujalt, G. R., Mason, M. G., Blanton, T., Barnes, C. L., and Margevich, D., J. Appl. Phys. 73 (2), 961 (1993).CrossRefGoogle Scholar
15Infrared Band Handbook, edited by Szymanski, H. A. (Plenum Press, New York, 1963), p. 23.Google Scholar
16Infrared Spectra and Characteristic Frequencies 700–300 cm−l, edited by Bentley, F. F., Smithson, L. D., and Rozek, A. L. (John Wiley & Sons, New York, 1968), p. 1528.Google Scholar
17Van de Pol, F. C. M., Blom, F. R., and Popma, Th. J., Thin Solid Films 202, 349 (1991).CrossRefGoogle Scholar
18Braunstein, G. and Paz-Pujalt, G.R., Thin Solid Films 216, 1 (1992).CrossRefGoogle Scholar