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Size effects on deformation mechanism of nanopillars by FIB-CVD using double-cantilever testing

Published online by Cambridge University Press:  04 November 2011

Yoji Shibutani ,
Takuya Nakano ,
Hiro Tanaka  and
Yasuo Kogo
Yoji Shibutani*
Affiliation:
Department of Mechanical Engineering, Osaka University, Suita, Osaka 565-0871, Japan
Takuya Nakano
Affiliation:
Department of Mechanical Engineering, Osaka University, Suita, Osaka 565-0871, Japan
Hiro Tanaka
Affiliation:
Department of Mechanical Engineering, University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
Yasuo Kogo
Affiliation:
Department of Material Science and Technology, Tokyo University of Science, Noda, Chiba 278-8510, Japan
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Nanopillars and nanocoils fabricated by chemical vapor deposition using a focused ion beam were used to estimate bending and torsional rigidities under infinitesimal deformation and to investigate nonlinear large deformation behaviors. For the pillars, we performed bending tests using a unique double-cantilever specimen, which was made by joining two pillars together using focused electron beam deposition in a scanning electron microscope. The reproducible load–deflection curves, which were not severely disturbed by the ambiguous chuck condition of the specimens, indicated that the pillar deformation resistance decreased after the linear response (called softening), and it was dependent on the pillar diameter and the ratio of diameter to length. However, all pillars became extremely hardened at large deformation. At diameters of less than 300 nm, and at diameter/length ratios of over 10−2, this nanopillar size effect (characterized as softening) was consistently observed.

Keywords

NanostructureStrengthChemical vapor deposition
Type
Articles
Information
Journal of Materials Research , Volume 27 , Issue 3: Focus Issue: Advances in Mechanics of One-Dimensional Micro/Nanomaterials , 14 February 2012 , pp. 521 - 527
Copyright
Copyright © Materials Research Society 2011

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References

REFERENCES

1.Koops, H.W., Kretz, J., Rudolph, M., Weber, M., Dahm, G., and Lee, L.: Characterization and application of materials grown by electron-beam-induced deposition. Jpn. J. Appl. Phys. Part 1 33, 7099 (1994).CrossRefGoogle Scholar
2.Hoyle, P.C., Cleaver, J.R., and Ahmed, H.J.: Electron beam induced deposition from W(CO)6 at 2 to 20 keV and its applications. J. Vac. Sci. Technol. B 14, 662 (1999).CrossRefGoogle Scholar
3.DeMarco, A.J. and Melngailis, J.J.: Lateral growth of focused ion beam deposited platinum for stencil mask repair. J. Vac. Sci. Technol. B 17, 3154 (1999).CrossRefGoogle Scholar
4.Matsui, S., Kaito, K., Fujita, J., Komura, M., Kanda, K., and Haruyama, Y.: Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition. J. Vac. Sci. Technol. B 18, 3181 (2000).CrossRefGoogle Scholar
5.Shibutani, Y. and Yoshioka, T.: Inleastic deformation of nanopillar by focused-ion-beam chemical vapor deposition. J. Vac. Sci. Technol. B 26, 201 (2008).CrossRefGoogle Scholar
6.Tanaka, H., Shinkai, M., Shibutani, Y., and Kogo, Y.: Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing. J. Vac. Sci. Technol. B 27, 2161 (2009).CrossRefGoogle Scholar
7.Fujita, J., Ishida, M., Ichihashi, T., Ochiai, Y., Kaito, T., and Matsui, S.: Growth of three-dimensional nano-structures using FIB-CVD and its mechanical properties. Nucl. Instrum. Methods Phys. Res. B 206, 472 (2003).CrossRefGoogle Scholar
8.Nishio, M., Sawaya, S., Akita, S., and Nakayama, Y.: Density of electron-beam-induced amorphous carbon deposits. J. Vac. Sci. Technol. B 23, 1975 (2005).CrossRefGoogle Scholar
9.Chen, X., Zhang, S., Dikin, D.A., Ding, W., Ruoff, R.S., Pan, L., and Nakayama, Y.: Mechanics of a carbon nanocoil. Nano Lett. 3, 1299 (2003).CrossRefGoogle Scholar
10.Gere, J.M. and Timoshenko, S.P.: Mechanics of Materials, 3rd ed. (PWS Publishing Comp., Boston, 1990), pp. 514, 517.Google Scholar
11.Kometani, R., Yusa, K., Warisawa, S., and Ishihara, S.: Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition. J. Vac. Sci. Technol. B 28, C6F38 (2010).CrossRefGoogle Scholar