Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-30T23:38:17.419Z Has data issue: false hasContentIssue false
  • English
  • Français

Preferable orientation of turbostratic BN basal planes from an x-ray absorption study

Published online by Cambridge University Press:  01 January 2006

X.T. Zhou ,
T.K. Sham ,
C.Y. Chan ,
W.J. Zhang ,
I. Bello ,
S.T. Lee ,
F. Heigl ,
A. Jürgenen  and
H. Hofsäss
X.T. Zhou
Affiliation:
Department of Chemistry, University of Western Ontario, London, Ontario, Canada N6A 5B7
T.K. Sham*
Affiliation:
Department of Chemistry, University of Western Ontario, London, Ontario, Canada N6A 5B7
C.Y. Chan
Affiliation:
Center of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, People's Republic of China
W.J. Zhang*
Affiliation:
Center of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, People's Republic of China
I. Bello
Affiliation:
Center of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, People's Republic of China
S.T. Lee
Affiliation:
Center of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, People's Republic of China
F. Heigl
Affiliation:
Canadian Synchrotron Radiation Facility (CSRF) at the Synchrotron Radiation Center, University of Wisconsin–Madison, Madison, Wisconsin 53589-3097
A. Jürgenen
Affiliation:
Canadian Synchrotron Radiation Facility (CSRF) at the Synchrotron Radiation Center, University of Wisconsin–Madison, Madison, Wisconsin 53589-3097
H. Hofsäss
Affiliation:
II. Institute of Physics, University of Göttingen, D-37077 Göttingen, Germany
*
a)Address all correspondence to these authors. e-mail: [email protected] e-mail: [email protected]
a)Address all correspondence to these authors. e-mail: [email protected] e-mail: [email protected]
Get access

Abstract

Two cubic boron nitride (c-BN) thin films (thickness, 80 nm), which were grown on silicon by mass-selected ion beam deposition and thin diamond film-coated silicon by magnetron sputtering technique respectively, were investigated by x-ray absorption near-edge spectroscopy (XANES) at the B K-edge. The angular dependences of the XANES recorded in fluorescence yield (FY) were used to show that the preferable orientation of the sp2-bonded turbostratic BN (t-BN) basal planes at the interfacial layers between the top c-BN film and Si substrate is normal or nearly normal to the substrate, which is consistent with previous transmission electron microscope analysis. The angular dependence was also used to show that the film deposited on diamond-coated Si has a higher relative amount of ordered t-BN at its film-substrate interface than the film on Si substrate. This work that shows a technique to determine the thin film structure, especially the interfacial structure between the thin films and their substrates x-ray absorption fine structure is a powerful mode.

Keywords

Thin filmX-ray fluorescenceTexture
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 1 , January 2006 , pp. 147 - 152
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Kester, D.J., Ailey, K.S., Davis, R.F. and More, K.L.: Phase evolution in boron-nitride thin-films. J. Mater. Res. 8, 1213 (1993).CrossRefGoogle Scholar
2.Mirkarimi, P.B., McCarty, K.F. and Medlin, D.L.: Review of advances in cubic boron nitride film synthesis. Mater. Sci. Eng. R21, 47 (1997).CrossRefGoogle Scholar
3.Park, K.S., Lee, D.Y., Kim, K.J. and Moon, D.W.: Observation of a hexagonal BN surface layer on the cubic BN film grown by dual ion beam sputter deposition. Appl. Phys. Lett. 70, 315 (1997).CrossRefGoogle Scholar
4.Li, Q., Marks, L.D., Lifshitz, Y., Lee, S.T. and Bello, I.: Controlling the nucleation environment of c-BN films and their related properties. Phys. Rev. B 65, 45415 (2002).CrossRefGoogle Scholar
5.Chan, C.Y., Zhang, W.J., Meng, X.M., Chan, K.M., Bello, I., Lifshitz, Y. and Lee, S.T.: The growth of thick cBN films employing fluorine chemistry and ECR deposition. Diamond Relat. Mater. 12, 1162 (2003).CrossRefGoogle Scholar
6.Chaiken, A., Terminello, L.J., Wong, J., Doll, G.L. and Taylor, C.A.: Electronic and atomic-structure of metastable phases of boron-nitride using core-level photoabsorption. Appl. Phys. Lett. 63, 2112 (1993).CrossRefGoogle Scholar
7.Jimenez, I., Jankowski, A.F., Terminello, L.J., Sutherland, D.G.J., Carlisle, J.A., Doll, G.L., Tong, W.M. and Shuh, D.K.: Core-level photoabsorption study of defects and metastable bonding configurations in boron nitride. Phys. Rev. B 55, 12025 (1997).CrossRefGoogle Scholar
8.Henke, B.L., Gullikson, E.M. and Davis, J.C.: X-ray interactions-photoabsorption, scattering, transmission and reflection at E = 50–30,000 eV, z = 1–92. Atom. Data Nucl. Data Tables 54, 181 (1993).CrossRefGoogle Scholar
9.Hofsäss, H., Ronning, C., Griesmeier, U., Gross, M., Reinke, S., Kuhr, M., Zweck, J. and Fischer, R.: Characterization of cubic boron nitride films grown by mass separated ion beam deposition. Nucl. Instrum. Methods Phys. Res., Sect. B 106, 153 (1995).CrossRefGoogle Scholar
10.Berns, D.H., Cappelli, M.A. and Shuh, D.K.: Near-edge x-ray absorption fine structure spectroscopy of arcjet-deposited cubic boron nitride. Diamond Relat. Mater. 6, 1883 (1997).CrossRefGoogle Scholar
11.Meitzner, G.D. and Fischer, D.A.: Distortions of fluorescence yield x-ray absorption spectra due to sample thickness. Microchem. J. 71, 281 (2002).CrossRefGoogle Scholar
12.Tröger, L., Arvanitis, D., Baberschke, K., Michaelis, H., Grimm, U. and Zschech, E.: Full correction of the self-absorption in soft-fluorescence extended x-ray-absorption fine-structure. Phys. Rev. B 46, 3283 (1992).CrossRefGoogle ScholarPubMed
13.Rosenberg, R.A., Love, P.J. and Rehn, V.: Polarization-dependent C(k) near-edge x-ray-absorption fine-structure of graphite. Phys. Rev. B 33, 4034 (1986).CrossRefGoogle ScholarPubMed
14.Stöhr, J.: NEXAFS Spectroscopy (Springer, New York, 1992).CrossRefGoogle Scholar
15.Sham, T.K. and Carr, R.G.: Carbon near edge x-ray absorption fine-structure (NEXAFS) studies of ethylene adsorption on Ni(111) and Ni(110) surfaces—Implication for surface-morphology insensitive reactions. J. Chem. Phys. 84, 4091 (1986).CrossRefGoogle Scholar