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Measuring the volume charge in dielectric films using single frequency electro-acoustic waves

Published online by Cambridge University Press:  03 March 2014

Dongfei Pei ,
Yuri M. Shkel ,
Daniel J. Klingenberg ,
Zakai I. Segal ,
Yoshio Nishi  and
J. Leon Shohet
Dongfei Pei
Affiliation:
Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
Yuri M. Shkel
Affiliation:
Commet LLC, Fitchburg, Wisconsin 53711
Daniel J. Klingenberg
Affiliation:
Department of Chemical and Biological Engineering and Rheology Research Center, University of Wisconsin, Madison, Wisconsin 53706
Zakai I. Segal
Affiliation:
Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
Yoshio Nishi
Affiliation:
Department of Electrical Engineering Stanford University, Stanford, California 94305
J. Leon Shohet*
Affiliation:
Plasma Processing and Technology Laboratory and Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

An electro-acoustic method for measuring volume charge distributions in dielectric films (50 μm–0.2 mm thick) is described. A high voltage (>1 kV) sinusoidal signal (frequency ∼ 2 kHz) is applied across the dielectric sample. The charges inside the dielectric material will mechanically respond to the input electric signal and excite acoustic waves. The acoustic waves can be detected and measured using a piezoelectric sensor. By analyzing the received acoustic signal, we are able to compare the amount of charge in various samples.

Type
Articles
Information
Journal of Materials Research , Volume 29 , Issue 4 , 28 February 2014 , pp. 501 - 508
Copyright
Copyright © Materials Research Society 2014 

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References

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