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The location and effects of Si in (Ti1–xSix)Ny thin films

Published online by Cambridge University Press:  31 January 2011

Axel Flink ,
Manfred Beckers ,
Jacob Sjölén ,
Tommy Larsson ,
Slawomir Braun ,
Lennart Karlsson  and
Lars Hultman
Axel Flink*
Affiliation:
Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
Manfred Beckers
Affiliation:
Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
Tommy Larsson
Affiliation:
Seco Tools AB, SE-737 82 Fagersta, Sweden
Slawomir Braun
Affiliation:
Division of Surface Physics and Chemistry, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
Lennart Karlsson
Affiliation:
Seco Tools AB, SE-737 82 Fagersta, Sweden
Lars Hultman
Affiliation:
Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

(Ti1–xSix)Ny (0 ≤ x ≤ 0.20; 0.99 ≤ y(x) ≤ 1.13) thin films deposited by arc evaporation have been investigated by analytical transmission electron microscopy, x-ray diffraction, x-ray photoelectron spectroscopy, and nanoindentation. Films with x ≤ 0.09 are single-phase cubic (Ti,Si)N solid solutions with a dense columnar microstructure. Films with x > 0.09 have a featherlike microstructure consisting of cubic TiN:Si nanocrystallite bundles separated by metastable SiNz with coherent-to-semicoherent interfaces and a dislocation density of as much as 1014 cm−2 is present. The films exhibit retained composition and hardness between 31 and 42 GPa in annealing experiments to 1000 °C due to segregation of SiNz to the grain boundaries. During annealing at 1100–1200 °C, this tissue phase thickens and transforms to amorphous SiNz. At the same time, Si and N diffuse out of the films via the grain boundaries and TiN recrystallize.

Keywords

HardnessThin filmTransmission electron microscopy (TEM)
Type
Articles
Information
Journal of Materials Research , Volume 24 , Issue 8 , August 2009 , pp. 2483 - 2498
Copyright
Copyright © Materials Research Society 2009

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