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Ion beam mixing, diffusion, and phase stability in Cu/Al2O3 interfaces

Published online by Cambridge University Press:  31 January 2011

K. Neubeck ,
H. Hahn ,
A. G. Balogh ,
H. Baumann ,
K. Bethge ,
D. M. Rück  and
N. Angert
K. Neubeck
Affiliation:
Department of Materials Science, Technical University, Darmstadt, Germany
H. Hahn
Affiliation:
Department of Materials Science, Technical University, Darmstadt, Germany
A. G. Balogh
Affiliation:
Department of Materials Science, Technical University, Darmstadt, Germany
H. Baumann
Affiliation:
Institut für Kernphysik, J. W. Goethe Universität, Frankfurt am Main, Germany
K. Bethge
Affiliation:
Institut für Kernphysik, J. W. Goethe Universität, Frankfurt am Main, Germany
D. M. Rück
Affiliation:
Institute for Heavy Ion Research (GSI), Darmstadt, Germany
N. Angert
Affiliation:
Institute for Heavy Ion Research (GSI), Darmstadt, Germany
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Abstract

Ion beam mixing, diffusion properties, and phase stability have been investigated in Cu/Al2O3 bilayer samples. Specimens were prepared by vapor deposition and irradiated with 150 keV Ar+ ions up to a fluence of 1.5 · 1017 Ar+/cm2. Sample temperature under irradiation was varied between 77 K and 673 K. The mixing behavior was studied by analyzing the concentration depth profiles, determined by Rutherford Backscattering Spectroscopy. It was found that mixing efficiencies of Cu, Al, and O scale with Ar+ fluence. Radiation enhanced diffusion (RED), observed above room temperature, is separated from ballistic mixing and high temperature diffusion. The migration enthalpy for interdiffusion in the RED region (between RT and 300 °C) was estimated to be approximately 0.3 eV. Sputtering yields depending on temperature gradient near to sample and phase stability versus ion dose and temperature are also discussed.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 5 , May 1996 , pp. 1277 - 1283
Copyright
Copyright © Materials Research Society 1996

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References

REFERENCES

1.Brager, H. A., Heinisch, H. L., and Garner, F. A., J. Nucl. Mater. 133–135, 676 (1985).CrossRefGoogle Scholar
2.Wanderka, N., Yuan, Y., Jiao, L., Wahi, R. P., and Wollenberger, H., in Proc. In. Conf. on Fusion Reactor Materials, Florida (1991).Google Scholar
3.Balogh, A. G., Macht, M-P., and Naundorf, V., J. Mater. Res. 9, 406 (1994).CrossRefGoogle Scholar
4.Averback, R. S., Nucl. Instrum. Methods B15, 675 (1986).Google Scholar
5.Rück, D. M., Nucl. Tracks Radiat. Meas. 19 (1–4), 951 (1991).CrossRefGoogle Scholar
6.Ziegler, J. F., Biersack, J.P., and Littmark, U., The Stopping and Range of Ions in Solids, edited by Ziegler, J. F. (Pergamon Press, New York, 1985).Google Scholar
7.Doolittle, L. R., Nucl. Instrum. Methods B9, 344 (1985).CrossRefGoogle Scholar
8.Matzunami, N., Yamamura, Y., Itikawa, Y., Itoh, N., Katzumata, Y., Miyagawa, S., Morita, K., Shimizu, R., and Tawara, H., At. Data Nucl. Data Tables 31, 1–80 (1984).CrossRefGoogle Scholar
9.Paine, B. M. and Averback, R. S., Nucl. Instrum. Methods B7/8, 666 (1985).Google Scholar
10.Besenbacher, F., Bøttiger, J., Nielsen, S. K., and Whitlow, H. J., Appl. Phys. A29, 141 (1982).CrossRefGoogle Scholar
11.Kim, S-J. and Nicolet, M-A., Averback, R. S., and Peak, D., Phys. Rev. B 37, 38 (1988).Google Scholar
12.Macht, M-P., Müller, A., Naudorf, V., and Wollenberger, H., Phys. Status Solidi A 104, 287 (1987).CrossRefGoogle Scholar
13.Averback, R. S. and Hahn, H., Phys. Rev. B 37, 10383 (1988).Google Scholar
14.Sizmann, R., J. Nucl. Mater. 69/70, 386 (1978)Google Scholar
15.Landolt-Börnstein, Diffusion in Solid Metals and Alloys, edited by H. Mehrer (Springer-Verlag, Berlin, 1993), Vol. 26.Google Scholar
16.Cooper, E. A., Kung, H., and Nastasi, M., in Proc. 9th Int. Conf. on Ion Beam Modification of Materials (in press).Google Scholar
17.Livak, R. J., Zocco, T. G., and Hobbs, L. W., J. Nucl. Mater. 144, 121 (1987).Google Scholar