Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-24T16:36:14.176Z Has data issue: false hasContentIssue false
  • English
  • Français

Interfacial adhesion and friction of pyrolytic carbon thin films on silicon substrates

Published online by Cambridge University Press:  31 January 2011

N. Deyneka-Dupriez ,
U. Herr ,
H-J. Fecht ,
A. Pfrang ,
Th. Schimmel ,
B. Reznik  and
D. Gerthsen
N. Deyneka-Dupriez*
Affiliation:
Institute of Micro- and Nanomaterials, University of Ulm, D-89081 Ulm, Germany
U. Herr
Affiliation:
Institute of Micro- and Nanomaterials, University of Ulm, D-89081 Ulm, Germany
H-J. Fecht
Affiliation:
Institute of Micro- and Nanomaterials, University of Ulm, D-89081 Ulm, Germany
A. Pfrang
Affiliation:
Institute of Applied Physics, University of Karlsruhe, D-76128 Karlsruhe, Germany
Th. Schimmel
Affiliation:
Institute of Applied Physics, University of Karlsruhe, D-76128 Karlsruhe, Germany; and Institute of Nanotechnology, Research Center Karlsruhe, D-76021 Karlsruhe, Germany
B. Reznik
Affiliation:
Laboratory of Electron Microscopy, University of Karlsruhe, D-76128 Karlsruhe, Germany
D. Gerthsen
Affiliation:
Laboratory of Electron Microscopy, University of Karlsruhe, D-76128 Karlsruhe, Germany
*
a)Address all correspondence to this author. e-mail: [email protected]
Get access

Abstract

Frictional behavior and interfacial adhesion of differently textured pyrolytic carbon layers on Si substrate were investigated by indentation and scratch testing. A large amount of elastic recovery and a low coefficient of friction (μ = 0.05 to 0.09) were observed. Elastic/plastic and frictional behaviors of the coatings are strongly influenced by the microstructure of the pyrolytic carbon films, especially by the texture. The critical load at which the first abrupt increase in the normal displacement occurs was used to characterize interfacial adhesive strength. A pyrolytic carbon film deposited at higher residence time from a gas mixture containing 3% oxygen exhibited higher critical loads than film deposited at lower residence time without oxygen. The results can be understood if one assumes that the gas phase composition during deposition significantly influences the bonding strength at the interface. Failure mechanisms are discussed for both types of films.

Keywords

AdhesionCCoating
Type
Articles
Information
Journal of Materials Research , Volume 23 , Issue 10 , October 2008 , pp. 2749 - 2756
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1Pfrang, A., Reznik, B., Gerthsen, D., Schimmel, Th.: Comparative study of differently textured pyrolytic carbon layers by atomic force, transmission electron and polarized light microscopy. Carbon 41, 181 2003CrossRefGoogle Scholar
2Pfrang, A., Hüttinger, K.J., Schimmel, Th.: Adhesion imaging of carbon-fibre-reinforced materials in the pulsed force mode of the atomic force microscope. Surf. Interface Anal. 33, 96 2002CrossRefGoogle Scholar
3Reznik, B., Gerthsen, D.: Microscopic study of failure mechanisms in infiltrated carbon fiber felts. Carbon 41, 57 2003CrossRefGoogle Scholar
4Randall, N.X., Favaro, G., Frankel, C.H.: The effect of intrinsic parameters on the critical load as measured with the scratch test method. Surf. Coat. Technol. 137, 146 2001CrossRefGoogle Scholar
5Randall, N.X., Consiglio, R.: Nanoscratch tester for thin film mechanical properties characterization. Rev. Sci. Instrum. 71, 2796 2000CrossRefGoogle Scholar
6Burnett, P.J., Rickerby, D.S.: The scratch adhesion test: An elastic-plastic indentation analysis. Thin Solid Films 157, 233 1988CrossRefGoogle Scholar
7Steinmann, P.A., Tardy, Y., Hintermann, H.E.: Adhesion testing by the scratch test method: The influence of intrinsic and extrinsic parameters on the critical load. Thin Solid Films 154, 333 1987CrossRefGoogle Scholar
8Ollendorf, H., Schneider, D.: A comparative study of adhesion test methods for hard coatings. Surf. Coat. Technol. 113, 86 1999CrossRefGoogle Scholar
9Lipkin, D.M., Beltz, G.E., Clarke, D.R.: A model of cleavage fracture along metal/ceramicinterfaces in Thin Films: Stresses and Mechanical Properties VI, edited by W.W. Gerberich, H. Gao, J-E. Sundgren, and S.P. Baker (Mater. Res. Soc. Symp. Proc. 436, Pittsburgh, PA, 1997), p. 91CrossRefGoogle Scholar
10Ottermann, C.R., Bange, K., Braband, A., Haefke, H., Gutmannsbauer, W.: Microscratch analysis of the adhesion failure on oxide thin films with different thickness in Thin Films: Stresses and Mechanical Properties VI, edited by W.W. Gerberich, H. Gao, J-E. Sundgren, and S.P. Baker (Mater. Res. Soc. Symp. Proc. 436, Pittsburgh, PA, 1997), p. 109CrossRefGoogle Scholar
11Bull, S.J.: Failure modes in scratch adhesion testing. Surf. Coat. Technol. 50, 25 1991CrossRefGoogle Scholar
12Bull, S.J., Rickerby, D.S., Matthews, A., Leyland, A., Pace, A.R., Valli, J.: The use of scratch adhesion testing for the determination of interfacial adhesion: The importance of frictional drag. Surf. Coat. Technol. 36, 503 1988CrossRefGoogle Scholar
13Ye, J., Kojima, N., Ueoka, K., Shimanuki, J., Nasuno, T., Ogawa, S.: Nanoscratch evaluation of adhesion and cohesion in SiC/low-k/Si stacked layers. J. Appl. Phys. 95, 3704 2004CrossRefGoogle Scholar
14De Pauw, V., Collin, A., Send, W., Hawecker, J., Gerthsen, D., Pfrang, A., Schimmel, Th.: Deposition rates during the early stages of pyrolytic carbon deposition in a hot-wall reactor and the development of texture. Carbon 44, 3091 2006CrossRefGoogle Scholar
15Benzinger, W., Becker, A., Hüttinger, K.J.: Chemistry and kinetics of chemical vapour deposition of pyrocarbon: I. Fundamentals of kinetics and chemical reaction engineering. Carbon 34, 957 1996CrossRefGoogle Scholar
16Oberlin, A.: Pyrocarbons. Carbon 40, 7 2002CrossRefGoogle Scholar
17Bourrat, X., Trouvat, B., Limousin, G., Vignoles, G., Doux, F.: Pyrocarbon anisotropy as measured by electron diffraction and polarized light. J. Mater. Res. 15, 92 2000CrossRefGoogle Scholar
18Gerthsen, D., Bach, D., De Pauw, V., Kalhofer, S., Reznik, B., Send, W.: Structural properties of the fiber-matrix interface in carbon-fiber/carbon-matrix composites and interfaces between carbon layers and planar substrates. Int. J. Mater. Res. 97, 1052 2006CrossRefGoogle Scholar
19Reznik, B., Hüttinger, K.J.: On the terminology for pyrolytic carbon. Carbon 40, 621 2002CrossRefGoogle Scholar
20Bobji, M.S., Biswas, S.K.: Hardness of a surface containing uniformly spaced pyramidal asperities. Tribology Letters 7, 51 1999CrossRefGoogle Scholar
21Bowden, F.P., Tabor, D.: The Friction and Lubrication of Solids Oxford Univ. Press New York 2001 112, 163CrossRefGoogle Scholar
22Ruan, J-A., Bhushan, B.: Frictional behavior of highly oriented pyrolytic graphite. J. Appl. Phys. 76, 8117 1994CrossRefGoogle Scholar
23Pierson, H.O.: Handbook of Carbon, Graphite, Diamond and Fullerenes–Properties, Processing and Applications Noyes Publications Park Ridge, NJ 1993 62Google Scholar
24Richter, A., Ries, R., Smith, R., Henkel, M., Wolf, B.: Nanoindentation of diamond, graphite and fullerene films. Diamond Relat. Mater. 9, 170 2000CrossRefGoogle Scholar
25Kriese, M.D., Moody, N.R., Gerberich, W.W.: Experimental considerations for indentation-induced adhesion measurement of multilayered thin films in Fundamentals of Nanondentation and Nanotribology, edited by N.R. Moody, W.W. Gerberich, N. Burnham, and S.P. Baker (Mater. Res. Soc. Symp. Proc. 522, Warrendale, PA, 1998), p. 365CrossRefGoogle Scholar
26Laugier, M.T.: Adhesion of TiC and TiN coatings prepared by chemical vapour deposition on WC–Co-based cemented carbides. J. Mater. Sci. 21, 2269 1986CrossRefGoogle Scholar
27Burnett, P.J., Rickerby, D.S.: The relationship between hardness and scratch adhession. Thin Solid Films 154, 403 1987CrossRefGoogle Scholar
28Venkataraman, S., Kohlstedt, D.L., Gerberich, W.W.: Microscratch analysis of the work of adhesion for Pt thin films on NiO. J. Mater. Res. 7, 1126 1992CrossRefGoogle Scholar
29Pfrang, A.: From the early stages of pyrocarbon deposition to composite materials—An investigation by scanning probe techniques. (Verlag Dr. Hut, München, Germany, 2005), p. 76Google Scholar
30Aly-Hassan, M.S., Hatta, H., Wakayama, S., Watanabe, M., Miyagawa, K.: Comparison of 2D and 3D carbon/carbon composites with respect to damage and fracture resistance. Carbon 41, 1069 2003CrossRefGoogle Scholar
31Furukawa, Y., Hatta, H., Kogo, Y.: Interfacial-shear strength of C/C composites. Carbon 41, 1819 2003CrossRefGoogle Scholar