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Fabrication of porous SiC-based ceramic microchannels via pyrolysis of templated preceramic polymers

Published online by Cambridge University Press:  01 June 2006

Quoc Dat Nghiem ,
Amit Asthana ,
In-Kyung Sung  and
Dong-Pyo. Kim
Quoc Dat Nghiem
Affiliation:
Department of Fine Chemical Engineering and Chemistry, Chungnam National University,Yuseong Gu, Daejeon 305-764, Republic of Korea
Amit Asthana
Affiliation:
Department of Fine Chemical Engineering and Chemistry, Chungnam National University,Yuseong Gu, Daejeon 305-764, Republic of Korea
In-Kyung Sung
Affiliation:
Department of Fine Chemical Engineering and Chemistry, Chungnam National University,Yuseong Gu, Daejeon 305-764, Republic of Korea
Dong-Pyo. Kim*
Affiliation:
Department of Fine Chemical Engineering and Chemistry, Chungnam National University,Yuseong Gu, Daejeon 305-764, Republic of Korea
*
a) Address all correspondence to this author. e-mail: [email protected]
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Abstract

This article reports conversion chemistry of preceramic polymer to ceramic phase during the fabrication of high-temperature stable silicon carbide and silicon carbonitride monolithic porous microchannels. The micromolding in capillariesmethod is used to fabricate porous channels by the initial infiltration of a solution of 1.5-μm diameter silica spheres or 1-μm diameter polystyrene spheres into polydimethylsiloxane channels followed by filling the void space among the spheres by using viscous commercial polymeric precursors. Subsequently, the polymer-sphere composite channel was cured and pyrolysed at 1200 °C under inert atmosphere, and final wet etching step of silica spheres with 10% hydrofluoric acid solution developed the pore structures by removing the silica spheres, whereas polystyrene sphere decomposes at the early stage of pyrolysis.

Keywords

LithographyMicrostructurePorous ceramic
Type
Articles
Information
Journal of Materials Research , Volume 21 , Issue 6 , June 2006 , pp. 1543 - 1549
Copyright
Copyright © Materials Research Society 2006

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