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The effect of the pore topology on the elastic modulus of organosilicate glasses

Published online by Cambridge University Press:  16 April 2013

Kong-Boon Yeap ,
Malgorzata Kopycinska-Mueller ,
Lei Chen ,
Yu Chen ,
Marco Jungmann ,
Reinhard Krause-Rehberg ,
Sukesh Mahajan ,
Joost Vlassak ,
Martin Gall  and
Ehrenfried Zschech
Kong-Boon Yeap
Affiliation:
Fraunhofer Institute for Nondestructive Testing, 01109 Dresden, Germany
Malgorzata Kopycinska-Mueller
Affiliation:
Fraunhofer Institute for Nondestructive Testing, 01109 Dresden, Germany; and Dresden University of Technology, Faculty of Electrical and Computer Engineering, 01068 Dresden, Germany
Lei Chen
Affiliation:
Queensland University of Technology, School of Chemistry, Physics and Mechanical Engineering department, Brisbane, Queensland 4001, Australia
Yu Chen
Affiliation:
National University of Singapore, Department of Mechanical Engineering, 117576 Singapore
Marco Jungmann
Affiliation:
Martin Luther University Halle, Department of Physics, 06120 Halle, Germany
Reinhard Krause-Rehberg
Affiliation:
Martin Luther University Halle, Department of Physics, 06120 Halle, Germany
Sukesh Mahajan
Affiliation:
SBA Materials, Inc., NE Albuquerque, New Mexico 87113
Joost Vlassak
Affiliation:
Harvard University, School of Engineering and Applied Sciences, Cambridge, Massachusetts 02138
Martin Gall
Affiliation:
Fraunhofer Institute for Nondestructive Testing, 01109 Dresden, Germany
Ehrenfried Zschech*
Affiliation:
Fraunhofer Institute for Nondestructive Testing, 01109 Dresden, Germany; and Dresden University of Technology, Faculty of Electrical and Computer Engineering, 01068 Dresden, Germany
*
a)Address all correspondence to this author. e-mail: [email protected]
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Abstract

Optimization of the pore topology in organosilicate glass (OSG) is crucial in the development of dielectrics with an extremely low k-value and a relatively high Young’s modulus. In this paper, a finite-element modeling strategy is applied to develop a general understanding of the relationship between porosity, pore topology, and elastic modulus for the porous OSG thin films. This relationship in combination with the experimental elastic modulus data from nanoindentation (NI) studies is used to predict the pore structure of various OSG films. In addition, positron annihilation spectroscopy measurements are performed to determine the threshold porosity for the transition from nonoverlapping to overlapping porous structure. A similar threshold value is determined based on the finite-element modeling and experimental NI data.

Type
Articles
Information
Journal of Materials Research , Volume 28 , Issue 9 , 14 May 2013 , pp. 1262 - 1268
Copyright
Copyright © Materials Research Society 2013 

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References

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