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Characterization and optical properties of diamondlike carbon prepared by electron cyclotron resonance plasma

Published online by Cambridge University Press:  31 January 2011

Xiao-Ming He ,
S-T. Lee ,
I. Bello ,
A. C. Cheung  and
C. S. Lee
Xiao-Ming He
Affiliation:
Department of Physics and Materials Science, City University of Hong Kong, Hong Kong
S-T. Lee
Affiliation:
Department of Physics and Materials Science, City University of Hong Kong, Hong Kong
I. Bello
Affiliation:
Department of Physics and Materials Science, City University of Hong Kong, Hong Kong
A. C. Cheung
Affiliation:
Department of Physics and Materials Science, City University of Hong Kong, Hong Kong
C. S. Lee
Affiliation:
Department of Physics and Materials Science, City University of Hong Kong, Hong Kong
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Abstract

Diamondlike carbon (DLC) films have been prepared on radio-frequency (rf) biased substrates maintained at low temperature using electron cyclotron resonance CH4–Ar plasma. The effects of negative rf bias and reactant gas composition on the bonding structure, hardness, and resistivity of the films were systematically investigated. DLC films deposited on PMMA (polymethyl methacrylate) were examined by optical methods to determine the absorption coefficients and the optical band gap. It was found that DLC films synthesized at bias voltage of 2(80–100) V and FCH4/FAr of 0.075–0.086 exhibit extreme hardness of more than 3000 kgf mm−2, high electrical resistivity up to 1014 Ω cm, band gap larger than 2.5 eV, and excellent optical transparency. The results indicate that ECR CH4–Ar plasma with low negative rf bias and suitable CH4/Ar gas ratio can process optically transparent and hard protective DLC films on PMMA plastics.

Type
Articles
Information
Journal of Materials Research , Volume 14 , Issue 3 , March 1999 , pp. 1055 - 1061
Copyright
Copyright © Materials Research Society 1999

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